SCOPUS 정보 검색 플랫폼

Nanoscale Research Letters

Volumn 3, Issue 1, 2008, Pages 6-13

Mechanical deformation induced in Si and GaN under Berkovich nanoindentation

(1) Jian, Sheng Rui a

a I SHOU UNIVERSITY (Taiwan)

Author keywords

Cross sectional transmission electron microscopy; Focused ion beam; GaN; Micro Raman spectroscopy; Nanoindentation; Si

Indexed keywords

CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; LOAD-DISPLACEMENT CURVES; MECHANICAL DEFORMATION; MICRO-RAMAN SPECTROSCOPY;

DEFORMATION; FOCUSED ION BEAMS; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOINDENTATION; RAMAN SPECTROSCOPY; SINGLE CRYSTALS; THIN FILMS;

SILICON;

EID: 38149139217 PISSN: 19317573 EISSN: 1556276X Source Type: Journal
DOI: 10.1007/s11671-007-9106-0 Document Type: Article

Times cited : (58)

References (43)

1
- 0034507393
- X.D. Li, B. Bhushan, Thin Solid Films 377-378, 401 (2000)
- (2000) Thin Solid Films , vol.377-378 , pp. 401
- Li, X.D.¹ Bhushan, B.²

2
- 0345119079
- X.D. Li, H. Gao, C.J. Murphy, K.K. Caswell, Nano Lett. 3, 1495 (2003)
- (2003) Nano Lett. , vol.3 , pp. 1495
- Li, X.D.¹ Gao, H.² Murphy, C.J.³ Caswell, K.K.⁴

3
- 0037822623
- S.R. Jian, T.H. Fang, D.S. Chuu, J. Electron. Mater. 32, 496 (2003)
- (2003) J. Electron. Mater. , vol.32 , pp. 496
- Jian, S.R.¹ Fang, T.H.² Chuu, D.S.³

4
- 31144450740
- S.R. Jian, T.H. Fang, D.S. Chuu, Appl. Surf. Sci. 252, 3033 (2006)
- (2006) Appl. Surf. Sci. , vol.252 , pp. 3033
- Jian, S.R.¹ Fang, T.H.² Chuu, D.S.³

5
- 27844524094
- X.J. Lu, X. Wang, P. Xiao, Thin Solid Films 494, 223 (2006)
- (2006) Thin Solid Films , vol.494 , pp. 223
- Lu, X.J.¹ Wang, X.² Xiao, P.³

6
- 33846322566
- P. Xu, J.J. Li, Q. Wang, Z.L. Wang, C.Z. Gu, Z. Cui, J. Appl. Phys. 101, 014312 (2007)
- (2007) J. Appl. Phys. , vol.101 , pp. 014312
- Xu, P.¹ Li, J.J.² Wang, Q.³ Wang, Z.L.⁴ Gu, C.Z.⁵ Cui, Z.⁶

7
- 0141884157
- A. Mujica, A. Rubio, A. Muñoz, R.J. Needs, Rev. Mod. Phys. 75, 863 (2003)
- (2003) Rev. Mod. Phys. , vol.75 , pp. 863
- Mujica, A.¹ Rubio, A.² Muñoz, A.³ Needs, R.J.⁴

8
- 0039569466
- J.E. Bradby, J.S. Williams, J.W. Leung, M.V. Swain, P. Munroe, Appl. Phys. Lett. 78, 3235 (2001)
- (2001) Appl. Phys. Lett. , vol.78 , pp. 3235
- Bradby, J.E.¹ Williams, J.S.² Leung, J.W.³ Swain, M.V.⁴ Munroe, P.⁵

9
- 0001156613
- J.E. Bradby, J.S. Williams, J.W. Leung, M.V. Swain, P. Munroe, Appl. Phys. Lett. 77, 3749 (2000)
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3749
- Bradby, J.E.¹ Williams, J.S.² Leung, J.W.³ Swain, M.V.⁴ Munroe, P.⁵

10
- 0001492071
- S.O. Kucheyev, J.E. Bradby, J.S. Williams, C. Jagadish, M. Toth, M.R. Phillips, M.V. Swain, Appl. Phys. Lett. 77, 3373 (2000)
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3373
- Kucheyev, S.O.¹ Bradby, J.E.² Williams, J.S.³ Jagadish, C.⁴ Toth, M.⁵ Phillips, M.R.⁶ Swain, M.V.⁷

11
- 0000224157
- S.O. Kucheyev, J.E. Bradby, J.S. Williams, C. Jagadish, M.V. Swain, G. Li, Appl. Phys. Lett. 78, 156 (2001)
- (2001) Appl. Phys. Lett. , vol.78 , pp. 156
- Kucheyev, S.O.¹ Bradby, J.E.² Williams, J.S.³ Jagadish, C.⁴ Swain, M.V.⁵ Li, G.⁶

12
- 79956019122
- J.E. Bradby, S.O. Kucheyev, J.S. Williams, J.W. Leung, M.V. Swain, P. Munroe, G. Li, M.R. Phillips, Appl. Phys. Lett. 80, 383 (2002)
- (2002) Appl. Phys. Lett. , vol.80 , pp. 383
- Bradby, J.E.¹ Kucheyev, S.O.² Williams, J.S.³ Leung, J.W.⁴ Swain, M.V.⁵ Munroe, P.⁶ Li, G.⁷ Phillips, M.R.⁸

13
- 0542443423
- H. Olijnyk, S.K. Sikka, W.B. Holzopfel, Phys. Lett. A 103, 137 (1984)
- (1984) Phys. Lett. A , vol.103 , pp. 137
- Olijnyk, H.¹ Sikka, S.K.² Holzopfel, W.B.³

14
- 33646256260
- J.Z. Hu, L.D. Merkle, C.S. Menoni, I.L. Spain, Phys. Rev. B 34, 4679 (1986)
- (1986) Phys. Rev. B , vol.34 , pp. 4679
- Hu, J.Z.¹ Merkle, L.D.² Menoni, C.S.³ Spain, I.L.⁴

15
- 0000163647
- J. Grain, G.J. Ackland, J.R. Maclean, R.O. Piltz, P.D. Hatton, D.S. Pawley, Phys. Rev. B 50, 13043 (1994)
- (1994) Phys. Rev. B , vol.50 , pp. 13043
- Grain, J.¹ Ackland, G.J.² MacLean, J.R.³ Piltz, R.O.⁴ Hatton, P.D.⁵ Pawley, D.S.⁶

16
- 0024647142
- G. Weill, J.L. Mansot, G. Sagon, C. Carlone, J.M. Besson, Semicond. Sci. Technol. 4, 280 (1989)
- (1989) Semicond. Sci. Technol. , vol.4 , pp. 280
- Weill, G.¹ Mansot, J.L.² Sagon, G.³ Carlone, C.⁴ Besson, J.M.⁵

17
- 0000402404
- A. Kailer, K.G. Nickel, Y.G. Gogotsi, J. Raman Spectrosc. 30, 939 (1999)
- (1999) J. Raman Spectrosc. , vol.30 , pp. 939
- Kailer, A.¹ Nickel, K.G.² Gogotsi, Y.G.³

18
- 0037428686
- I. Zarudi, J. Zou, L.C. Zhang, Appl. Phys. Lett. 82, 874 (2003)
- (2003) Appl. Phys. Lett. , vol.82 , pp. 874
- Zarudi, I.¹ Zou, J.² Zhang, L.C.³

19
- 0037347946
- D. Ge, V. Domnich, Y. Gogotsi, J. Appl. Phys. 93, 2418 (2003)
- (2003) J. Appl. Phys. , vol.93 , pp. 2418
- Ge, D.¹ Domnich, V.² Gogotsi, Y.³

20
- 33748285994
- S. Ruffell, J.E. Bradby, J.S. Williams, Appl. Phys. Lett. 89, 091919 (2006)
- (2006) Appl. Phys. Lett. , vol.89 , pp. 091919
- Ruffell, S.¹ Bradby, J.E.² Williams, J.S.³

21
- 34247551312
- M.M.O. Khayyat, D.G. Hasko, M.M. Chaudhri, J. Appl. Phys. 101, 083515 (2007)
- (2007) J. Appl. Phys. , vol.101 , pp. 083515
- Khayyat, M.M.O.¹ Hasko, D.G.² Chaudhri, M.M.³

22
- 0035352065
- J.E. Bradby, J.S. Williams, J.W. Leung, M.V. Swain, P. Munroe, J. Mater. Res. 16, 1500 (2001)
- (2001) J. Mater. Res. , vol.16 , pp. 1500
- Bradby, J.E.¹ Williams, J.S.² Leung, J.W.³ Swain, M.V.⁴ Munroe, P.⁵

23
- 0037450216
- I. Zarudi, L.C. Zhang, M.V. Swain, Appl. Phys. Lett. 82, 1027 (2003)
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1027
- Zarudi, I.¹ Zhang, L.C.² Swain, M.V.³

24
- 4344711156
- I. Zarudi, L.C. Zhang, J. Zou, T. Vodenitcharova, J. Mater. Res. 19, 332 (2004)
- (2004) J. Mater. Res. , vol.19 , pp. 332
- Zarudi, I.¹ Zhang, L.C.² Zou, J.³ Vodenitcharova, T.⁴

25
- 0001753996
- V. Domnich, Y. Gogotsi, S. Dub, Appl. Phys. Lett. 76, 2214 (2000)
- (2000) Appl. Phys. Lett. , vol.76 , pp. 2214
- Domnich, V.¹ Gogotsi, Y.² Dub, S.³

26
- 0000144195
- A. Kailer, Y.G. Gogotsi, K.G. Nickel, J. Appl. Phys. 81, 3057 (1997)
- (1997) J. Appl. Phys. , vol.81 , pp. 3057
- Kailer, A.¹ Gogotsi, Y.G.² Nickel, K.G.³

27
- 0000553337
- D.R. Clarke, M.C. Kroll, P.D. Kirchner, R.F. Cook, B.J. Hockey, Phys. Rev. Lett. 60, 2156 (1988)
- (1988) Phys. Rev. Lett. , vol.60 , pp. 2156
- Clarke, D.R.¹ Kroll, M.C.² Kirchner, P.D.³ Cook, R.F.⁴ Hockey, B.J.⁵

28
- 0034174590
- Y.G. Gogosti, V. Domnich, S.N. Dub, A. Kailer, K.G. Nickel, J. Mater. Res. 15, 871 (2000)
- (2000) J. Mater. Res. , vol.15 , pp. 871
- Gogosti, Y.G.¹ Domnich, V.² Dub, S.N.³ Kailer, A.⁴ Nickel, K.G.⁵

29
- 0033300472
- I. Zarudi, L.C. Zhang, Tribol. Int. 32, 701 (1999)
- (1999) Tribol. Int. , vol.32 , pp. 701
- Zarudi, I.¹ Zhang, L.C.²

30
- 0005985130
- S.J. Pearton, J.C. Zolper, R.J. Shul, F. Ren, J. Appl. Phys. 86, 1 (1999)
- (1999) J. Appl. Phys. , vol.86 , pp. 1
- Pearton, S.J.¹ Zolper, J.C.² Shul, R.J.³ Ren, F.⁴

31
- 0035933013
- S.J. Pearton, F. Ren, A.P. Zhang, G. Dang, X.A. Cao, K.P. Lee, Mater. Sci. Eng. B. 82, 227 (2001)
- (2001) Mater. Sci. Eng. B. , vol.82 , pp. 227
- Pearton, S.J.¹ Ren, F.² Zhang, A.P.³ Dang, G.⁴ Cao, X.A.⁵ Lee, K.P.⁶

32
- 1842865586
- C.H. Oxley, Solid-State Electron. 48, 1197 (2004)
- (2004) Solid-State Electron. , vol.48 , pp. 1197
- Oxley, C.H.¹

33
- 0032154674
- K. Funato, F. Nakamura, S. Hashimoto, M. Ikeda, Jpn. J. Appl. Phys. 37, L1023 (1998)
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 1023
- Funato, K.¹ Nakamura, F.² Hashimoto, S.³ Ikeda, M.⁴

34
- 33845917832
- P. Kavouras, Ph. Komninou, Th. Karakostas, Thin Solid Films 515, 3011 (2007)
- (2007) Thin Solid Films , vol.515 , pp. 3011
- Kavouras, P.¹ Komninou, Ph.² Karakostas, Th.³

35
- 0041193484
- R. Nowak, T. Sekino, S. Maruno, K. Niihara, Appl. Phys. Lett. 68, 1063 (1996)
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1063
- Nowak, R.¹ Sekino, T.² Maruno, S.³ Niihara, K.⁴

36
- 79956005526
- S.O. Kucheyev, J.E. Bradby, J.S. Williams, C. Jagadish, M.V. Swain, Appl. Phys. Lett. 80, 956 (2002)
- (2002) Appl. Phys. Lett. , vol.80 , pp. 956
- Kucheyev, S.O.¹ Bradby, J.E.² Williams, J.S.³ Jagadish, C.⁴ Swain, M.V.⁵

37
- 0001172325
- A. Munoz, K. Kunc, Phys. Rev. B 44, 10372 (1991)
- (1991) Phys. Rev. B , vol.44 , pp. 10372
- Munoz, A.¹ Kunc, K.²

38
- 0026771684
- P.E. Van Camp, V.E. Van Doren, J.T. Devreese, Solid State Commun. 81, 23 (1992)
- (1992) Solid State Commun. , vol.81 , pp. 23
- Van Camp, P.E.¹ Van Doren, V.E.² Devreese, J.T.³

39
- 0000282321
- H. Xia, Q. Xia, A.L. Ruoff, Phys. Rev. B 47, 12925 (1993)
- (1993) Phys. Rev. B , vol.47 , pp. 12925
- Xia, H.¹ Xia, Q.² Ruoff, A.L.³

40
- 0002898232
- M. Ueno, M. Yoshida, A. Onodera, O. Shimomura, K. Takemura, Phys. Rev. B 49, 14 (1994)
- (1994) Phys. Rev. B , vol.49 , pp. 14
- Ueno, M.¹ Yoshida, M.² Onodera, A.³ Shimomura, O.⁴ Takemura, K.⁵

41
- 4944237913
- P. Puech, F. Demangeot, J. Frandon, C. Pinquier, M. Kuball, V. Domnich, Y. Gogotsi, J. Appl. Phys. 96, 2853 (2004)
- (2004) J. Appl. Phys. , vol.96 , pp. 2853
- Puech, P.¹ Demangeot, F.² Frandon, J.³ Pinquier, C.⁴ Kuball, M.⁵ Domnich, V.⁶ Gogotsi, Y.⁷

42
- 29044433258
- S.J. Bull, J. Phys. D: Appl. Phys. 38, R393 (2005)
- (2005) J. Phys. D: Appl. Phys. , vol.38 , pp. 393
- Bull, S.J.¹

43
- 0242305167
- Y. Gaillard, C. Tromas, J. Woirgard, Phil. Mag. Lett. 83, 553 (2003)
- (2003) Phil. Mag. Lett. , vol.83 , pp. 553
- Gaillard, Y.¹ Tromas, C.² Woirgard, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.