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Volumn 60, Issue 5, 2013, Pages 1689-1694

Channel length-dependent charge detrapping on threshold voltage shift of amorphous InGaZnO TFTs under dynamic bias stress

Author keywords

Channel length variation; Charge detrapping; Electrical instability; InGaZnO (a IGZO); Thin film transistors (TFTs)

Indexed keywords

CHANNEL LENGTH; CHARGE DE-TRAPPING; ELECTRICAL INSTABILITY; INGAZNO; THIN-FILM TRANSISTOR (TFTS);

EID: 84887067371     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2013.2253466     Document Type: Article
Times cited : (10)

References (27)
  • 1
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature, vol. 432, no. 7016, pp. 488-492, Nov. 2004. (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 2
    • 33748795083 scopus 로고    scopus 로고
    • High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering
    • Sep.
    • H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, "High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering," Appl. Phys. Lett., vol. 89, no. 11, pp. 112123-1-112123-3, Sep. 2006.
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.11 , pp. 1121231-1121233
    • Yabuta, H.1    Sano, M.2    Abe, K.3    Aiba, T.4    Den, T.5    Kumomi, H.6    Nomura, K.7    Kamiya, T.8    Hosono, H.9
  • 3
    • 38549145327 scopus 로고    scopus 로고
    • Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors
    • Jan.
    • A. Suresh and J. F. Muth, "Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors," Appl. Phys. Lett., vol. 92, no. 3, pp. 033502-1-033502-3, Jan. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.3 , pp. 0335021-0335023
    • Suresh, A.1    Muth, J.F.2
  • 4
    • 79952855765 scopus 로고    scopus 로고
    • Analysis of bias stress instability in amorphous InGaZnO thin-film transistors
    • Mar.
    • E. N. Cho, J. H. Kang, C. E. Kim, P. Moon, and I. Yun, "Analysis of bias stress instability in amorphous InGaZnO thin-film transistors," IEEE Trans. Device Mater. Rel., vol. 11, no. 1, pp. 112-117, Mar. 2011.
    • (2011) IEEE Trans. Device Mater. Rel. , vol.11 , Issue.1 , pp. 112-117
    • Cho, E.N.1    Kang, J.H.2    Kim, C.E.3    Moon, P.4    Yun, I.5
  • 5
    • 69049093543 scopus 로고    scopus 로고
    • Charge trapping and detrapping characteristics in amorphous InGaZnO TFTs under static and dynamic stresses
    • Jan.
    • I.-T. Cho, J.-M. Lee, J.-H. Lee, and H.-I. Kwon, "Charge trapping and detrapping characteristics in amorphous InGaZnO TFTs under static and dynamic stresses," Semicond. Sci. Technol., vol. 24, no. 1, p. 015013, Jan. 2009.
    • (2009) Semicond. Sci. Technol. , vol.24 , Issue.1 , pp. 015013
    • Cho, I.-T.1    Lee, J.-M.2    Lee, J.-H.3    Kwon, H.-I.4
  • 7
    • 84866733720 scopus 로고    scopus 로고
    • Effects of alternating pulse bias stress on amorphous InGaZnO thin film transistors
    • May
    • S. Park, E. N. Cho, and I. Yun, "Effects of alternating pulse bias stress on amorphous InGaZnO thin film transistors," ECS Trans., vol. 45, no. 7, pp. 111-117, May 2012.
    • (2012) ECS Trans. , vol.45 , Issue.7 , pp. 111-117
    • Park, S.1    Cho, E.N.2    Yun, I.3
  • 8
    • 84866742404 scopus 로고    scopus 로고
    • Threshold voltage shift prediction for gate bias stress on amorphous InGaZnO thin film transistors
    • Sep.-Oct.
    • S. Park, E. N. Cho, and I. Yun, "Threshold voltage shift prediction for gate bias stress on amorphous InGaZnO thin film transistors," Microelectron. Rel., vol. 52, nos. 9-10, pp. 2215-2219, Sep.-Oct. 2012.
    • (2012) Microelectron. Rel. , vol.52 , Issue.9-10 , pp. 2215-2219
    • Park, S.1    Cho, E.N.2    Yun, I.3
  • 9
    • 79957544626 scopus 로고    scopus 로고
    • Contact resistance dependent scalingdown behavior of amorphous InGaZnO thin-film transistors
    • Jul.
    • E. N. Cho, J. H. Kang, and I. Yun, "Contact resistance dependent scalingdown behavior of amorphous InGaZnO thin-film transistors," Current Appl. Phys., vol. 11, no. 4, pp. 1015-1019, Jul. 2011.
    • (2011) Current Appl. Phys. , vol.11 , Issue.4 , pp. 1015-1019
    • Cho, E.N.1    Kang, J.H.2    Yun, I.3
  • 10
    • 0038343609 scopus 로고    scopus 로고
    • Analysis of narrow width effects in polycrystalline silicon thin film transistors
    • Jan.
    • H.-W. Zan, T.-C. Chang, P.-S. Shih, D.-Z. Peng, T.-Y. Huang, and C.-Y. Chang, "Analysis of narrow width effects in polycrystalline silicon thin film transistors," Jpn. J. Appl. Phys., vol. 42, no. 1, pp. 28-32, Jan. 2003.
    • (2003) Jpn. J. Appl. Phys. , vol.42 , Issue.1 , pp. 28-32
    • Zan, H.-W.1    Chang, T.-C.2    Shih, P.-S.3    Peng, D.-Z.4    Huang, T.-Y.5    Chang, C.-Y.6
  • 11
    • 41649120938 scopus 로고    scopus 로고
    • Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states
    • Apr.
    • H.-H. Hsieh, T. Kamiya, K. Nomura, H. Hosono, and C.-C. Wu, "Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states," Appl. Phys. Lett., vol. 92, no. 13, pp. 133503-1-133503-3, Apr. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.13 , pp. 1335031-1335033
    • Hsieh, H.-H.1    Kamiya, T.2    Nomura, K.3    Hosono, H.4    Wu, C.-C.5
  • 12
    • 84863312310 scopus 로고    scopus 로고
    • Investigation on the relationship between channel resistance and subgap density of states of amorphous InGaZnO thin film transistors
    • Sep.
    • S. Park, E. N. Cho, and I. Yun, "Investigation on the relationship between channel resistance and subgap density of states of amorphous InGaZnO thin film transistors," Solid State Electron., vol. 75, pp. 93-96, Sep. 2012.
    • (2012) Solid State Electron. , vol.75 , pp. 93-96
    • Park, S.1    Cho, E.N.2    Yun, I.3
  • 13
    • 67650483313 scopus 로고    scopus 로고
    • Flexible full color organic light-emitting diode display on polyimide plastic substrate driven by amorphous indium gallium zinc oxide thin-film transistors
    • Jul.
    • J.-S. Park, T.-W. Kim, D. Stryakhilev, J.-S. Lee, S.-G. An, Y.-S. Pyo, D.-B. Lee, Y. G. Mo, D.-U. Jin, and H. K. Chung, "Flexible full color organic light-emitting diode display on polyimide plastic substrate driven by amorphous indium gallium zinc oxide thin-film transistors," Appl. Phys. Lett., vol. 95, no. 1, pp. 013503-1-013503-3, Jul. 2009.
    • (2009) Appl. Phys. Lett. , vol.95 , Issue.1 , pp. 0135031-0135033
    • Park, J.-S.1    Kim, T.-W.2    Stryakhilev, D.3    Lee, J.-S.4    An, S.-G.5    Pyo, Y.-S.6    Lee, D.-B.7    Mo, Y.G.8    Jin, D.-U.9    Chung, H.K.10
  • 14
    • 84887047036 scopus 로고    scopus 로고
    • Santa Clara, CA, USA: AEA
    • R. C. Whaley, ATLAS. Santa Clara, CA, USA: AEA, 2008.
    • (2008) ATLAS
    • Whaley, R.C.1
  • 15
    • 21544438388 scopus 로고
    • Charge trapping instabilities in amorphous siliconsilicon nitride thin-film transistors
    • Sep.
    • M. J. Powell, "Charge trapping instabilities in amorphous siliconsilicon nitride thin-film transistors," Appl. Phys. Lett., vol. 43, no. 6, pp. 597-599, Sep. 1983.
    • (1983) Appl. Phys. Lett. , vol.43 , Issue.6 , pp. 597-599
    • Powell, M.J.1
  • 16
    • 36449009572 scopus 로고
    • Bias-stress-induced stretched-exponential time dependence of charge injection and trapping in amorphous thinfilm transistors
    • Dec.
    • F. R. Libsch and J. Kanicki, "Bias-stress-induced stretched-exponential time dependence of charge injection and trapping in amorphous thinfilm transistors," Appl. Phys. Lett., vol. 62, no. 11, pp. 1286-1-1286-3, Dec. 1993.
    • (1993) Appl. Phys. Lett. , vol.62 , Issue.11 , pp. 12861-12863
    • Libsch, F.R.1    Kanicki, J.2
  • 17
    • 66749143525 scopus 로고    scopus 로고
    • Comparative study of electrical instabilities in topgate InGaZnO thin film transistors with Al2O3 and Al2O3/SiNx gate dielectrics
    • Jun.
    • J.-M. Lee, I.-T. Cho, J.-H. Lee, W.-S. Cheong, C.-S. Hwang, and H.-I. Kwon, "Comparative study of electrical instabilities in topgate InGaZnO thin film transistors with Al2O3 and Al2O3/SiNx gate dielectrics," Appl. Phys. Lett., vol. 94, no. 22, pp. 222112-1-222112-3, Jun. 2009.
    • (2009) Appl. Phys. Lett. , vol.94 , Issue.22 , pp. 2221121-2221123
    • Lee, J.-M.1    Cho, I.-T.2    Lee, J.-H.3    Cheong, W.-S.4    Hwang, C.-S.5    Kwon, H.-I.6
  • 19
    • 80052926528 scopus 로고    scopus 로고
    • Effects of channel thickness variation on bias stress instability of InGaZnO thin-film transistors
    • Sep.-Nov.
    • E. N. Cho, J. H. Kang, and I. Yun, "Effects of channel thickness variation on bias stress instability of InGaZnO thin-film transistors," Microelectron. Rel., vol. 51, nos. 9-11, pp. 1792-1795, Sep.-Nov. 2011.
    • (2011) Microelectron. Rel. , vol.51 , Issue.9-11 , pp. 1792-1795
    • Cho, E.N.1    Kang, J.H.2    Yun, I.3
  • 20
    • 33746606543 scopus 로고    scopus 로고
    • Scaling behavior of ZnO transparent thin-film transistors
    • Jul.
    • H.-H. Hsieh and C.-C. Wu, "Scaling behavior of ZnO transparent thin-film transistors," Appl. Phys. Lett., vol. 89, no. 4, pp. 041109-1-041109-3, Jul. 2006.
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.4 , pp. 0411091-0411093
    • Hsieh, H.-H.1    Wu, C.-C.2
  • 21
    • 70450210334 scopus 로고    scopus 로고
    • Electrical instability of RF sputter amorphous In-Ga-Zn-O thin-film transistors
    • Dec.
    • T.-C. Fung, K. Abe, H. Kumomi, and J. Kanicki, "Electrical instability of RF sputter amorphous In-Ga-Zn-O thin-film transistors," J. Display Technol., vol. 5, no. 12, pp. 452-461, Dec. 2009.
    • (2009) J. Display Technol. , vol.5 , Issue.12 , pp. 452-461
    • Fung, T.-C.1    Abe, K.2    Kumomi, H.3    Kanicki, J.4
  • 23
    • 84861712573 scopus 로고    scopus 로고
    • Performance of 5-nm a-IGZO TFTs with various channel lengths and an etch stopper manufactured by back UV exposure
    • Jun
    • M. Mativenga, D. Geng, J. H. Chang, T. J. Tredwell, and J. Jang, "Performance of 5-nm a-IGZO TFTs with various channel lengths and an etch stopper manufactured by back UV exposure," IEEE Electron Device Lett., vol. 33, no. 6, pp. 824-826, Jun. 2012.
    • (2012) IEEE Electron Device Lett. , vol.33 , Issue.6 , pp. 824-826
    • Mativenga, M.1    Geng, D.2    Chang, J.H.3    Tredwell, T.J.4    Jang, J.5
  • 24
    • 0029516165 scopus 로고
    • Analytical models for amorphous-silicon and polysilicon thin-film transistors for high-definition-display technology
    • Dec.
    • M. S. Shur, M. D. Jacunski, H. C. Slade, and M. Hack, "Analytical models for amorphous-silicon and polysilicon thin-film transistors for high-definition-display technology," J. Soc. Inf. Display, vol. 3, no. 4, pp. 223-236, Dec. 1995.
    • (1995) J. Soc. Inf. Display , vol.3 , Issue.4 , pp. 223-236
    • Shur, M.S.1    Jacunski, M.D.2    Slade, H.C.3    Hack, M.4
  • 25
    • 33747291818 scopus 로고    scopus 로고
    • Threshold voltage, field effect mobility, and gate-to-channel capacitance in polysilicon TFT'S
    • Sep.
    • M. D. Jacunski, M. S. Shur, and M. Hack, "Threshold voltage, field effect mobility, and gate-to-channel capacitance in polysilicon TFT'S," IEEE Trans. Electron Devices, vol. 43, no. 9, pp. 1433-1440, Sep. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , Issue.9 , pp. 1433-1440
    • Jacunski, M.D.1    Shur, M.S.2    Hack, M.3
  • 27
    • 79551552419 scopus 로고    scopus 로고
    • Instabilities in amorphous oxide semiconductor thin-film transistors
    • Dec.
    • J. F. Conley, "Instabilities in amorphous oxide semiconductor thin-film transistors," IEEE Trans. Device Mater. Rel., vol. 10, no. 4, pp. 460-475, Dec. 2010.
    • (2010) IEEE Trans. Device Mater. Rel. , vol.10 , Issue.4 , pp. 460-475
    • Conley, J.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.