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Volumn 94, Issue 22, 2009, Pages
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Comparative study of electrical instabilities in top-gate InGaZnO thin film transistors with Al2O3 and Al2O 3/SiNx gate dielectrics
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPARATIVE STUDIES;
DENSITY OF TRAP STATE;
DEVICE DEGRADATION;
ELECTRICAL INSTABILITY;
SUBTHRESHOLD SLOPE;
THRESHOLD VOLTAGE SHIFTS;
TIME DEPENDENCE;
TOP-GATE;
TRAPPED ELECTRONS;
ALUMINUM;
CHARGE TRAPPING;
DEGRADATION;
ELECTRIC NETWORK ANALYSIS;
GALLIUM;
GATES (TRANSISTOR);
INDIUM;
MOS CAPACITORS;
OZONE WATER TREATMENT;
SILICON NITRIDE;
THIN FILM TRANSISTORS;
THIN FILMS;
THRESHOLD VOLTAGE;
ZINC;
ZINC OXIDE;
GATE DIELECTRICS;
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EID: 66749143525
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3151865 Document Type: Article |
Times cited : (106)
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References (12)
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