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Volumn 11, Issue 4, 2011, Pages 1015-1019
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Contact resistance dependent scaling-down behavior of amorphous InGaZnO thin-film transistors
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Author keywords
Contact resistance; InGaZnO; Short channel effects; Thin film transistors
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Indexed keywords
CHANNEL LENGTH;
CHANNEL WIDTHS;
CONTACT RESISTANCE EFFECTS;
ELECTRICAL PROPERTY;
FIELD-EFFECT MOBILITIES;
INGAZNO;
SCALING EFFECTS;
SHORT-CHANNEL DEVICES;
SHORT-CHANNEL EFFECT;
SUBTHRESHOLD SWING;
AMORPHOUS FILMS;
DRAIN CURRENT;
ELECTRIC PROPERTIES;
THIN FILM TRANSISTORS;
CONTACT RESISTANCE;
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EID: 79957544626
PISSN: 15671739
EISSN: None
Source Type: Journal
DOI: 10.1016/j.cap.2011.01.017 Document Type: Article |
Times cited : (43)
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References (13)
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