In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 710, Issue , 2013, Pages 82-86

  Merthe, Daniel J ^a   Goldberg, Kenneth A ^a   Yashchuk, Valeriy V ^a   McKinney, Wayne R ^a   Celestre, Richard ^a   Mochi, Iacopo ^a   MacDougall, James ^a   Morrison, Gregory Y ^a   Rekawa, Senajith B ^a   Anderson, Erik ^a   Smith, Brian V ^a   Domning, Edward E ^a   Padmore, Howard ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Knife edge measurement; Metrology of x ray optics; Shearing interferometry; Synchrotron radiation

Indexed keywords

INTERFEROMETERS; LIGHT SOURCES; MIRRORS; MULTILAYERS; SUN; SYNCHROTRON RADIATION; UNITS OF MEASUREMENT; X RAY OPTICS;

ADVANCED LIGHT SOURCE; AT-WAVELENGTH METROLOGIES; DIFFRACTION-LIMITED BEAMS; ELLIPTICAL MIRRORS; KNIFE EDGE; LATERAL SHEARING INTERFEROMETER; SHEARING INTERFEROMETRY; SOFT X-RAY MIRROR;

SHEARING;

EID: 84886395591     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2012.10.105     Document Type: Article

References (27)

1. C.M. Kewish, L. Assoufid, A.T. Macrander, J. Qian, Applied Optics 11 (2007) 2010.
2. C.M. Kewish, M. Guizar-Sicaros, C. Liu, J. Qian, B. Shi, C. Benson, A.M. Khounsary, J. Vila-Comamala, O. Bunk, J.R. Fienup, A.T. Macrander, L. Assoufid, Optical Express 18 (2010) 23420.
3. P. Mercere, M. Idir, P. Zeitoun, X. Levecq, G. Dovillaire, S. Bucourt, D. Douillet, K.A. Goldberg, P.P. Naulleau, S.B. Rekawa, AIP Conference Proceedings 705 (2003) 819.
4. P. Mercere, P. Zeitoun, M. Idir, S.L. Pape, D. Douillet, X. Levecq, G. Dovillaire, S. Bucourt, K.A. Goldberg, P.P. Naulleau, S.B. Rekawa, Optics Letters 28 (2003) 1534.
5. P. Mercere, M. Idir, T. Moreno, G. Cauchon, G. Dovillaire, X. Levecq, L. Couvet, S. Bucourt, P. Zeitoun, Optics Letters 31 (2006) 199.
6. P. Mercere, M. Idir, T. Moreno, G. Cauchon, G. Dovillaire, X. Levecq, S. Bucourt, AIP Conference Proceedings 879 (2007) 722.
7. H. Mimura, S. Matsuyama, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, M. Shibahara, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi, Japan Journal of Applied Physics 44 (2005) L539.
8. H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi, Applied Physics Letters 90 (2007) 051903.
9. H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi, Nature Physics 6 (2010) 146.
10. K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, Journal of Physics: Condensed Matter 23 (2011) 394206.
11. H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi, Review of Scientific Instruments 77 (2006) 063712.
12. S. Yuan, M. Church, V.V. Yashchuk, K.A. Goldberg, R.S. Celestre, W.R. McKinney, J. Kirschman, G.Y. Morrison, T. Noll, T. Warwick, H. Padmore, X-Ray Optics and Instrumentation 2010 (2010) 784732.
13. D. Malacara, Optical Shop Testing, 3rd edition, John Wiley and Sons Inc., 2007.
14. P.P. Naulleau, K.A. Goldberg, J. Bokor, Journal of Vacuum Science and Technology B 18 (2000) 2939.
15. S. Yuan, K.A. Goldberg, V.V. Yashchuk, R.S. Celestre, I. Mochi, J. MacDougall, G.Y. Morrison, B.V. Smith, E.E. Domning, W.R. McKinney, T. Warwick, Proceedings of SPIE 7801 (2010) 78010D.
16. S. Yuan, K.A. Goldberg, V.V. Yashchuk, R. Celestre, W.R. McKinney, G. Morrison, J. Macdougall, I. Mochi, T. Warwick, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 635 (2011) S58.
17. D.J. Merthe, K.A. Goldberg, V.V. Yashchuk, S. Yuan, W.R. McKinney, R. Celestre, I. Mochi, J. Macdougall, G.Y. Morrison, S.B. Rakawa, E. Anderson, B.V. Smith, E.E. Domning, T. Warwick, H. Padmore, Proceedings of SPIE 8139 (2011) 813907.
18. O. Hignette, A.K. Freund, E. Chinchio, Proceedings of SPIE 3152 (1997) 188.
19. W.R. McKinney, J.L. Kirschman, A.A. MacDowell, T. Warwick, V.V. Yashchuk, Optical Engineering 48 (2009) 083601-083601-8.
20. J. Kirschman, E.E. Domning, W.R. McKinney, G.Y. Morrison, B.V. Smith, V.V. Yashchuk, Proceedings of SPIE 7077 (2008) 70770A.
21. H.F. Talbot, Philosophical Magazine 9 (1836) 401.
22. M. Takeda, H. Ina, S. Kobayashi, Journal of Optical Society of America 72 (1982) 156.
23. D. Malacara, Applied Optics 29 (1990) 3633.
24. M. Servin, D. Malacara, J.L. Marroquin, Applied Optics 35 (1996) 4343.
25. S. Yuan, V.V. Yashchuk, K.A. Goldberg, R.S. Celestre, W.R. McKinney, G.Y. Morrison, T. Warwick, H. Padmore, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 649 (2011) 160.
26. W.R. McKinney, V.V. Yashchuk, D.J. Merthe, N.A. Artemiev, K. Goldberg, Proceedings of SPIE 8501 (2012).
27. V.V. Yashchuk, K.A. Goldberg, D.J. Merthe, N.A. Artemiev, R. Celestre, E.E. Domning, W.R. McKinney, G.Y. Morrison, M. Kunz, B.V. Smith, N. Tamura, H.A. Padmore, Experimental methods for optimal tuning and alignment of bendable mirrors for diffraction-limited soft x-ray focusing, in: Proceedings of the 11th Conference of Synchrotron Radiation Instrumentation.