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Volumn 635, Issue 1 SUPPL., 2011, Pages
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Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror
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Author keywords
Free electron laser; KB mirror; Long trace profiler; Metrology; Optical slope metrology; Shearing interferometry; Synchrotron radiation; Wavefront measurements; X ray
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Indexed keywords
KB MIRROR;
LONG TRACE PROFILER;
METROLOGY;
OPTICAL SLOPE METROLOGY;
SHEARING INTERFEROMETRY;
WAVEFRONT MEASUREMENTS;
ELECTRONS;
FREE ELECTRON LASERS;
INTERFEROMETRY;
LASERS;
LIGHT SOURCES;
SHEARING;
SYNCHROTRON RADIATION;
SYNCHROTRONS;
UNITS OF MEASUREMENT;
WAVEFRONTS;
MIRRORS;
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EID: 79952532492
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2010.09.120 Document Type: Conference Paper |
Times cited : (15)
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References (24)
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