Drifting potential humps in ionization zones: The propeller blades of high power impulse magnetron sputtering

Applied Physics Letters

Volumn 103, Issue 14, 2013, Pages

  Anders, André ^a   Panjan, Matjaž ^a,b   Franz, Robert ^a,c   Andersson, Joakim ^a,d   Ni, Pavel ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c UNIVERSITY OF LEOBEN   (Austria)

^d NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; MAGNETRON SPUTTERING;

ELECTRIC AND MAGNETIC FIELDS; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HUMP FORMATIONS; ION ENERGY DISTRIBUTION FUNCTIONS; NEGATIVE SPACE CHARGE; PROPELLER BLADES;

IONIZATION POTENTIAL;

EID: 84885608643     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4823827     Document Type: Article

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