Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

Applied Physics Letters

Volumn 103, Issue 5, 2013, Pages

  Andersson, Joakim ^a,b   Ni, Pavel ^a   Anders, André ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE LAYER FORMATION; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); INTERFERENCE FILTERS; SELF ORGANIZATIONS; SPECTRAL LINE; SPECTROSCOPIC IMAGING; TARGET MATERIALS; TARGET SURFACE;

ATOMS; IONS;

IONIZATION OF GASES;

EID: 84882321851     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4817257     Document Type: Article

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