Spokes and charged particle transport in HiPIMS magnetrons

Journal of Physics D: Applied Physics

Volumn 46, Issue 8, 2013, Pages

  Brenning, N ^a   Lundin, D ^a   Minea, T ^b   Costin, C ^c   Vitelaru, C ^b,d  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITÉ PARIS SUD   (France)

^c ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^d NATIONAL INSTITUTE FOR OPTOELECTRONICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLE TRANSPORT; COLLISIONAL; DENSE PLASMA; DISCHARGE CURRENTS; ELECTRON ENERGIZATION; ENERGY SPECTRA; EXPERIMENTAL OBSERVATION; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); IONIZATION VELOCITY; MONTE CARLO; PARTICLE-IN-CELL; PLASMA SCIENCE; POTENTIAL STRUCTURE; PULSED-POWER; SCIENTIFIC COMMUNITY;

CHARGED PARTICLES; ELECTRIC DISCHARGES; MONTE CARLO METHODS; PARTICLE SEPARATORS;

PLASMA SIMULATION;

EID: 84873889078     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/8/084005     Document Type: Article

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