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Microelectronic Engineering

Volumn 110, Issue , 2013, Pages 450-456

Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses

(1) Chang, Tien Li a

a NATIONAL TAIWAN NORMAL UNIVERSITY (Taiwan)

Author keywords

Ablation; Femtosecond laser; Fluence; Microfluidic channels; Micromachining

Indexed keywords

ABLATION; COMPOSITE MICROMECHANICS; FLUIDIC DEVICES; GLASS; IRRADIATION; LASER PULSES; MICROFLUIDICS; MICROMACHINING; SURFACE ROUGHNESS; ULTRAFAST LASERS; ULTRASHORT PULSES;

FLUENCES; INCUBATION EFFECTS; INFRARED FEMTOSECOND LASERS; INTEGRATED MICROFLUIDIC CHIPS; IRRADIATION PULSE ENERGY; MICROFLUIDIC CHANNEL; OPTICAL BREAKDOWN; PROCESS MODELING;

PULSE REPETITION RATE;

EID: 84885186037 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.03.142 Document Type: Article

Times cited : (14)

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