Femtosecond-pulsed laser micromachining and optical damage by an erbium-doped fiber-laser system

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2334-2337

  Mizunami, Toru ^a   Ehara, Akimasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ablation; Erbium doped fiber; Femtosecond pulse; Fiber laser; Micromachining; Thin film

Indexed keywords

AVERAGE POWER; DIRECT AMPLIFICATION; ERBIUM DOPED; ERBIUM DOPED FIBERS; FEMTOSECOND PULSE; FEMTOSECONDS; FIBER OPTIC CONNECTORS; LASER MICRO-MACHINING; LOOP MIRROR; OPTICAL DAMAGES; PASSIVELY MODE-LOCKED; PEAK POWER; PULSE EXTRACTION; PULSE WIDTH; REPETITION RATE;

ABLATION; AMORPHOUS CARBON; AMORPHOUS FILMS; AMPLIFICATION; CARBON FILMS; CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; ELECTROMAGNETIC PULSE; ERBIUM; FIBER LASERS; FIBERS; MICROMACHINING; MIRRORS; POLYVINYL CHLORIDES; PULSE REPETITION RATE; PULSED LASERS; ULTRASHORT PULSES;

MODE-LOCKED FIBER LASERS;

EID: 79960038804     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.102     Document Type: Conference Paper

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