Sub-micron ablation of metallic thin film by femtosecond pulse laser

Optics and Laser Technology

Volumn 34, Issue 7, 2002, Pages 575-578

  Venkatakrishnan, K ^a   Tan, B ^a   Sivakumar, N R ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Ablation; Femtosecond pulsed laser

Indexed keywords

HEAT AFFECTED ZONE; LASER ABLATION; LASER PULSES; MICROMACHINING; PULSED LASER APPLICATIONS; THIN FILMS;

FEMTOSECOND PULSED LASERS;

METALLIC FILMS;

EID: 0036783462     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-3992(02)00074-9     Document Type: Article

References (4)

1. Laser ablation and micromachining with femtosecond laser pulses
2. Machining of submicron holes using a femtosecond laser at 800 nm
3. Submicron lines in thin metallic films micromachined by an ultrafast laser oscillator