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Applied Physics A: Materials Science and Processing

Volumn 109, Issue 2, 2012, Pages 441-448

Sapphire surface patterning using femtosecond laser micromachining

(6) Chang, Cho Wei a Chen, Chien Yu b Chang, Tien Li c Ting, Chia Jen d Wang, Chien Ping e Chou, Chang Pin a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

c NATIONAL TAIWAN NORMAL UNIVERSITY (Taiwan)

d INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

e INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION DEPTH; ALTERNATIVE METHODS; COMPETITIVE TOOLS; DESIGN CHANGE; FEMTOSECOND LASER MICROMACHINING; FS-LASER; MICROMACHINING PROCESS; REPETITION RATE; SAPPHIRE SURFACE; SINGLE-STEP; SURFACE STRUCTURING; TWO-DIMENSIONAL ARRAYS; WET CHEMICALS;

LASERS; TWO DIMENSIONAL; ULTRASHORT PULSES; YTTERBIUM;

SAPPHIRE;

EID: 84870244612 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-012-7048-6 Document Type: Article

Times cited : (28)

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