Fabrication of spiral-shaped microfluidic channels in glass by femtosecond laser

Materials Letters

Volumn 64, Issue 13, 2010, Pages 1427-1429

  Li, Yan ^a   Qu, Shi liang ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Laser processing; Microstructure; Surfaces

Indexed keywords

CHANNEL QUALITY; FEMTO-SECOND LASER; HYDROFLUORIC ACID ETCHING; INCIDENT LASER; INTERNAL SURFACES; LASER PROCESSING; MICROFLUIDIC CHANNEL; SCANNING SPEED;

ACIDS; FIBER OPTIC SENSORS; FLUIDIC DEVICES; GLASS; HYDROFLUORIC ACID; MICROFLUIDICS; MICROSTRUCTURE; PULSED LASER APPLICATIONS; ULTRASHORT PULSES;

GLASS LASERS;

EID: 77953130988     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2010.03.040     Document Type: Article

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