Novel 3D microelectrodes and pipettes by wet and dry etching

Microelectronic Engineering

Volumn 100, Issue , 2012, Pages 33-36

  Dimaki, Maria ^a   Vazquez, Patricia ^b   Aimone, Alessandro ^a   Olsen, Mark H ^a   Sasso, Luigi ^a   Rodriguez Trujillo, Romen ^a   Svendsen, Winnie E ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Electrical characterization; Electrochemical characterization; Fabrication techniques; Micro and nanoelectrodes

Indexed keywords

BRAIN SLICES; ELECTRICAL CHARACTERIZATION; ELECTROCHEMICAL CHARACTERIZATIONS; ELECTRODE SURFACE AREA; FABRICATION PROCESS; FABRICATION TECHNIQUE; HIGH ASPECT RATIO; MICRO-FABRICATION TECHNIQUES; NANO-ELECTRODES; SILICON ETCHING; WET AND DRY;

ASPECT RATIO; AUTOMOBILE MANUFACTURE; CELL CULTURE; ELECTROPHYSIOLOGY; FABRICATION; MICROELECTRODES; THREE DIMENSIONAL COMPUTER GRAPHICS;

ELECTROCHEMICAL ELECTRODES;

EID: 84867336328     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.115     Document Type: Article

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