-
3
-
-
74249100902
-
-
10.3390/ijms10125411
-
Ni M. Tong W.H. Choudhury D. Rahim N.A. A. Iliescu C. Yu H. Int. J. Mol. Sci. 2009, 10(12):5411. 10.3390/ijms10125411.
-
(2009)
Int. J. Mol. Sci.
, vol.10
, Issue.12
, pp. 5411
-
-
Ni, M.1
Tong, W.H.2
Choudhury, D.3
Rahim, N.A.A.4
Iliescu, C.5
Yu, H.6
-
6
-
-
0025210818
-
-
10.1016/0925-4005(90)80210-Q
-
Manz A. Miyahara Y. Miura J. Watanabe Y. Miyagi H. Sato K. Sens. Actuators, B 1990, 1(1-6):249. 10.1016/0925-4005(90)80210-Q.
-
(1990)
Sens. Actuators, B
, vol.1
, Issue.1-6
, pp. 249
-
-
Manz, A.1
Miyahara, Y.2
Miura, J.3
Watanabe, Y.4
Miyagi, H.5
Sato, K.6
-
12
-
-
69249206306
-
Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments
-
S.M. thesis, Massachusetts Institute of Technology, Cambridge, MA.
-
Mao P. Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments. 2005, S.M. thesis, Massachusetts Institute of Technology, Cambridge, MA.
-
(2005)
-
-
Mao, P.1
-
13
-
-
75149163839
-
-
10.1039/b925993g.
-
Becker H. Lab Chip 2010, 10:271. 10.1039/b925993g.
-
(2010)
Lab Chip
, vol.10
, pp. 271
-
-
Becker, H.1
-
15
-
-
84859331385
-
-
2-6 October 2011, Seattle, WA, USA.
-
Brassard D. Clime L. Li K. Geissler M. Miville-Godin C. Roy E. Veres T. Proceedings of MicroTAS 2011 and 2-6 October 2011, Seattle, WA, USA.
-
Proceedings of MicroTAS 2011
-
-
Brassard, D.1
Clime, L.2
Li, K.3
Geissler, M.4
Miville-Godin, C.5
Roy, E.6
Veres, T.7
-
17
-
-
84859299005
-
MEMS lithography
-
V. Lindroos, M. Tilli, A. Lehto, T. Motooka, edited by, and (Elsevier, New York).
-
Franssila S. Tuomikoski S. MEMS lithography. Handbook of Silicon Based MEMS Materials and Technologies 2010, V. Lindroos, M. Tilli, A. Lehto, T. Motooka, and in edited by and (Elsevier, New York).
-
(2010)
Handbook of Silicon Based MEMS Materials and Technologies
-
-
Franssila, S.1
Tuomikoski, S.2
-
20
-
-
34548018353
-
-
10.1021/ac0703956
-
Sikanen T. Heikkilä L. Tuomikoski S. Ketola R.A. Kostiainen R. Franssila S. Kotiaho T. Anal. Chem. 2007, 79(16):6255. 10.1021/ac0703956.
-
(2007)
Anal. Chem.
, vol.79
, Issue.16
, pp. 6255
-
-
Sikanen, T.1
Heikkilä, L.2
Tuomikoski, S.3
Ketola, R.A.4
Kostiainen, R.5
Franssila, S.6
Kotiaho, T.7
-
22
-
-
1642444032
-
-
10.1016/j.sna.2003.09.022
-
El-Ali J. Perch-Nielsen I.R. Poulsen C.R. Bang D.D. Telleman P. Wolff A. Sens. Actuators, A 2004, 110:3. 10.1016/j.sna.2003.09.022.
-
(2004)
Sens. Actuators, A
, vol.110
, pp. 3
-
-
El-Ali, J.1
Perch-Nielsen, I.R.2
Poulsen, C.R.3
Bang, D.D.4
Telleman, P.5
Wolff, A.6
-
24
-
-
43649092174
-
-
10.1016/j.tibtech.2008.02.009
-
Fu J. Mao P. Han J. Trends Biotechnol. 2008, 26(6):311. 10.1016/j.tibtech.2008.02.009.
-
(2008)
Trends Biotechnol.
, vol.26
, Issue.6
, pp. 311
-
-
Fu, J.1
Mao, P.2
Han, J.3
-
27
-
-
17144379361
-
-
10.1016/j.sna.2004.09.004
-
Tiggelaar R.M. van Male P. Berenschot J.W. Gardeniers J.G. E. Oosterbroek R.E. de Croon M.H. J. M. Schouten J.C. van den Berg A. Elwenspoek M.C. Sens. Actuators, A 2005, 119:196. 10.1016/j.sna.2004.09.004.
-
(2005)
Sens. Actuators, A
, vol.119
, pp. 196
-
-
Tiggelaar, R.M.1
van Male, P.2
Berenschot, J.W.3
Gardeniers, J.G.E.4
Oosterbroek, R.E.5
de Croon, M.H.J.M.6
Schouten, J.C.7
van den Berg, A.8
Elwenspoek, M.C.9
-
30
-
-
33750018189
-
-
10.1109/JMEMS.2006.879671
-
Franssila S. Marttila S. Kolari K. Östman P. Kotiaho T. Kostiainen R. Lehtiniemi R. Fager C.-M. Manninen J. J. Microelectromech. Syst. 2006, 15:1251. 10.1109/JMEMS.2006.879671.
-
(2006)
J. Microelectromech. Syst.
, vol.15
, pp. 1251
-
-
Franssila, S.1
Marttila, S.2
Kolari, K.3
Östman, P.4
Kotiaho, T.5
Kostiainen, R.6
Lehtiniemi, R.7
Fager, C.-M.8
Manninen, J.9
-
35
-
-
73249128454
-
-
10.1016/j.chroma.2009.12.009
-
Lewis A.C. Hamilton J.F. Rhodes C.N. Halliday J. Bartle K.D. Homewood P. Grenfell R.J. P. Goody B. Harling A.M. Brewer P. Vargha G. Milton M.J. T. J. Chromatogr. A 2010, 1217:768. 10.1016/j.chroma.2009.12.009.
-
(2010)
J. Chromatogr. A
, vol.1217
, pp. 768
-
-
Lewis, A.C.1
Hamilton, J.F.2
Rhodes, C.N.3
Halliday, J.4
Bartle, K.D.5
Homewood, P.6
Grenfell, R.J.P.7
Goody, B.8
Harling, A.M.9
Brewer, P.10
Vargha, G.11
Milton, M.J.T.12
-
40
-
-
0033891780
-
-
10.1109/84.825783
-
de Boer M.J. Tjerkstra R.W. Berenschot J.W. Jansen H.V. Burger G.J. Gardeniers J.G. E. Elwenspoek M. van den Berg A. J. Microelectromech. Syst. 2000, 9:94. 10.1109/84.825783.
-
(2000)
J. Microelectromech. Syst.
, vol.9
, pp. 94
-
-
de Boer, M.J.1
Tjerkstra, R.W.2
Berenschot, J.W.3
Jansen, H.V.4
Burger, G.J.5
Gardeniers, J.G.E.6
Elwenspoek, M.7
van den Berg, A.8
-
41
-
-
4344679112
-
-
10.1016/j.sna.2003.12.029
-
Paik S.-J. Byun S. Lim J.-M. Park Y. Lee A. Chung S. Chang J. Chun K. Cho D. Sens. Actuators, A 2004, 114:276. 10.1016/j.sna.2003.12.029.
-
(2004)
Sens. Actuators, A
, vol.114
, pp. 276
-
-
Paik, S.-J.1
Byun, S.2
Lim, J.-M.3
Park, Y.4
Lee, A.5
Chung, S.6
Chang, J.7
Chun, K.8
Cho, D.9
-
47
-
-
0036771758
-
-
10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C
-
Berthold A. Laugere F. Schellevis H. de Boer C.R. Laros M. Guijt R.M. Sarro P.M. Vellekoop M.J. Electrophoresis 2002, 23:3511. 10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C.
-
(2002)
Electrophoresis
, vol.23
, pp. 3511
-
-
Berthold, A.1
Laugere, F.2
Schellevis, H.3
de Boer, C.R.4
Laros, M.5
Guijt, R.M.6
Sarro, P.M.7
Vellekoop, M.J.8
-
56
-
-
0031147386
-
-
10.1016/S0924-4247(97)01360-5
-
Grétillat M.A. Paoletti F. Thiébaud P. Roth S. Moudelka-Hep M. de Rooij N.F. Sens. Actuators, A 1997, 60:219. 10.1016/S0924-4247(97)01360-5.
-
(1997)
Sens. Actuators, A
, vol.60
, pp. 219
-
-
Grétillat, M.A.1
Paoletti, F.2
Thiébaud, P.3
Roth, S.4
Moudelka-Hep, M.5
de Rooij, N.F.6
-
64
-
-
4544233318
-
-
10.1016/j.sna.2003.12.013
-
Bu M. Melvin T. Ensell G.J. Wilkinson J.S. Evans A.G. R. Sens. Actuators, A 2004, 115:476. 10.1016/j.sna.2003.12.013.
-
(2004)
Sens. Actuators, A
, vol.115
, pp. 476
-
-
Bu, M.1
Melvin, T.2
Ensell, G.J.3
Wilkinson, J.S.4
Evans, A.G.R.5
-
66
-
-
84859293826
-
-
See for processing information for Foturan(R) glass.
-
See for processing information for Foturan(R) glass. http://www.mikroglas.com/index.php?PAGE_ID=538#.
-
-
-
-
74
-
-
84859334433
-
-
patents DE4241045 (1994), U.S. 5501893 (26 March 1996), and EP 625285
-
Lä F. Schilp A. 1992, and patents DE4241045 (1994), U.S. 5501893 (26 March 1996), and EP 625285.
-
(1992)
-
-
Lä, F.1
Schilp, A.2
-
77
-
-
0001898753
-
Chemical etching
-
J. L. Vossen, W. Kern, edited by, and (Academic, Orlando).
-
Kern W. Deckert C.A. Chemical etching. Thin Film Processes 1978, J. L. Vossen, W. Kern, and in edited by and (Academic, Orlando).
-
(1978)
Thin Film Processes
-
-
Kern, W.1
Deckert, C.A.2
-
82
-
-
0017934475
-
-
10.1016/S0042-207X(78)80514-4.
-
Grossman D.G. Vacuum 1978, 28(2):55. 10.1016/S0042-207X(78)80514-4.
-
(1978)
Vacuum
, vol.28
, Issue.2
, pp. 55
-
-
Grossman, D.G.1
-
89
-
-
84859357819
-
Microfabrication of heated Nebulizer chips for mass spectrometry
-
Ph.D. dissertation (Aalto University).
-
Saarella V. Microfabrication of heated Nebulizer chips for mass spectrometry. 2010, Ph.D. dissertation (Aalto University).
-
(2010)
-
-
Saarella, V.1
-
92
-
-
76649110189
-
-
10.1016/j.aca.2010.01.005
-
Haapala M. Saarela V. Pól J. Kolari K. Kotiaho T. Franssila S. Kostiainen R. Anal. Chim. Acta 2010, 662:163. 10.1016/j.aca.2010.01.005.
-
(2010)
Anal. Chim. Acta
, vol.662
, pp. 163
-
-
Haapala, M.1
Saarela, V.2
Pól, J.3
Kolari, K.4
Kotiaho, T.5
Franssila, S.6
Kostiainen, R.7
-
94
-
-
63049096799
-
-
10.1016/j.sna.2009.01.018.
-
Mrozek P. Sens. Actuators, A 2009, 151:77. 10.1016/j.sna.2009.01.018.
-
(2009)
Sens. Actuators, A
, vol.151
, pp. 77
-
-
Mrozek, P.1
-
97
-
-
57349182203
-
-
10.1051/epjap:2008176
-
Svarnas P. Plecis A. Nanteuil C. Duong D. David C. Muller M. Chen Y. Eur. Phys. J.: Appl. Phys. 2008, 44:245. 10.1051/epjap:2008176.
-
(2008)
Eur. Phys. J.: Appl. Phys.
, vol.44
, pp. 245
-
-
Svarnas, P.1
Plecis, A.2
Nanteuil, C.3
Duong, D.4
David, C.5
Muller, M.6
Chen, Y.7
-
105
-
-
34548238293
-
-
10.1016/j.sna.2006.10.009
-
Poenar D.P. Iliescu C. Carp M. Pang A.J. Leck K.J. Sens. Actuators, A 2007, 139:162. 10.1016/j.sna.2006.10.009.
-
(2007)
Sens. Actuators, A
, vol.139
, pp. 162
-
-
Poenar, D.P.1
Iliescu, C.2
Carp, M.3
Pang, A.J.4
Leck, K.J.5
-
111
-
-
68249157054
-
-
10.1088/0960-1317/19/7/075013
-
Choi D.-H. Yeo C.-H. Kim J.-T. Ok C.-W. Kim J.-S. Kwon Y. Im Y.-H. J. Micromech. Microeng. 2009, 19:075013. 10.1088/0960-1317/19/7/075013.
-
(2009)
J. Micromech. Microeng.
, vol.19
, pp. 075013
-
-
Choi, D.-H.1
Yeo, C.-H.2
Kim, J.-T.3
Ok, C.-W.4
Kim, J.-S.5
Kwon, Y.6
Im, Y.-H.7
-
118
-
-
77954598808
-
-
10.1063/1.3456626.
-
Pethig R. Biomicrofluidics 2010, 4:022811. 10.1063/1.3456626.
-
(2010)
Biomicrofluidics
, vol.4
, pp. 022811
-
-
Pethig, R.1
-
121
-
-
47249096960
-
-
10.1088/0960-1317/18/7/073001.
-
Esashi M. J. Micromech. Microeng. 2008, 18:073001. 10.1088/0960-1317/18/7/073001.
-
(2008)
J. Micromech. Microeng.
, vol.18
, pp. 073001
-
-
Esashi, M.1
-
127
-
-
0033709140
-
-
in (IEEE, Miyazaki, Japan)
-
van der Wijngaart W. Andersson H. Enoksson P. Noren K. Stemme G. Proceedings of IEEE MEMS 2000, 674. and in (IEEE, Miyazaki Japan), p.
-
(2000)
Proceedings of IEEE MEMS
, pp. 674
-
-
van der Wijngaart, W.1
Andersson, H.2
Enoksson, P.3
Noren, K.4
Stemme, G.5
-
128
-
-
84859298981
-
-
See for the CM Scientific corporate website.
-
See for the CM Scientific corporate website.
-
-
-
-
129
-
-
84859357815
-
-
See for the Swagelok corporate website.
-
See for the Swagelok corporate website.
-
-
-
-
130
-
-
84859293823
-
-
See for the Valco Instruments Co. Inc., corporate website.
-
See for the Valco Instruments Co. Inc., corporate website.
-
-
-
-
131
-
-
33244456985
-
-
10.1016/j.snb.2005.06.009
-
Saarela V. Franssila S. Tuomikoski S. Marttila S. Östman P. Sikanen T. Kotiaho T. Kostiainen R. Sens. Actuators B 2005, 114:552. 10.1016/j.snb.2005.06.009.
-
(2005)
Sens. Actuators B
, vol.114
, pp. 552
-
-
Saarela, V.1
Franssila, S.2
Tuomikoski, S.3
Marttila, S.4
Östman, P.5
Sikanen, T.6
Kotiaho, T.7
Kostiainen, R.8
-
135
-
-
84859357811
-
-
See for the CorSolutions corporate website.
-
See for the CorSolutions corporate website.
-
-
-
|