First-principles molecular dynamics study of the thermal stability of the BN, AlN, SiC and SiN interfacial layers in TiN-based heterostructures: Comparison with experiments

Thin Solid Films

Volumn 545, Issue , 2013, Pages 391-400

  Ivashchenko, V I ^a   Veprek S ^b  

^a FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Heterostructures; Nanocomposites; Theoretical calculations; Thermal stability; TiN AlN; TiN BN; TiN SiC; TiN SiN

Indexed keywords

THEORETICAL CALCULATIONS; TIN-ALN; TIN-BN; TIN-SIC; TIN-SIN;

BORON NITRIDE; CALCULATIONS; COATINGS; EPITAXIAL GROWTH; HETEROJUNCTIONS; MOLECULAR DYNAMICS; NANOCOMPOSITES; SILICON CARBIDE; THERMODYNAMIC STABILITY; TITANIUM NITRIDE;

SILICON NITRIDE;

EID: 84884981080     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.08.047     Document Type: Article

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