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Volumn 85, Issue 19, 2012, Pages

Comparative first-principles study of TiN/SiN x/TiN interfaces

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EID: 84861156408     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.85.195403     Document Type: Article
Times cited : (37)

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