Growth and characterization of TiN/SiN(001) superlattice films

Journal of Materials Research

Volumn 22, Issue 11, 2007, Pages 3255-3264

  Söderberg, Hans ^a   Odén, Magnus ^a   Flink, Axel ^b   Birch, Jens ^b   Persson, Per O Å ^b   Beckers, Manfred ^b   Hultman, Lars ^b  

^a LULEÅ UNIVERSITY OF TECHNOLOGY   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; FILM GROWTH; HARDENING; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SUPERLATTICES; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

DUAL-REACTIVE MAGNETRON SPUTTERING; SUPERLATTICE FILMS; SUPERLATTICE HARDENING; X-RAY REFLECTION;

SEMICONDUCTING FILMS;

EID: 36549000345     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0412     Document Type: Article

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