A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

Annals of Physics

Volumn 339, Issue , 2013, Pages 181-207

  Hauer, B D ^a   Doolin, C ^a   Beach, K S D ^a   Davis, J P ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Classical resonator; Damped Brownian motion; MEMS; NEMS; Thermomechanical calibration

Indexed keywords

EID: 84884377152     PISSN: 00034916     EISSN: 1096035X     Source Type: Journal    
DOI: 10.1016/j.aop.2013.08.003     Document Type: Review

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