High quality mechanical and optical properties of commercial silicon nitride membranes

Applied Physics Letters

Volumn 92, Issue 10, 2008, Pages

  Zwickl, B M ^a   Shanks, W E ^a   Jayich, A M ^a   Yang, C ^a   Jayich, A C Bleszynski ^a   Thompson, J D ^a   Harris, J G E ^a  

^a Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL INSTRUMENTS; OPTICAL PROPERTIES; QUANTUM THEORY;

OPTOMECHANICAL SYSTEMS; SILICON NITRIDE MEMBRANES;

SILICON NITRIDE;

EID: 40849150710     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2884191     Document Type: Article

References (26)

1. S. Bose, K. Jacobs, and P. L. Knight, Phys. Rev. A PLRAAN 1050-2947 10.1103/PhysRevA.59.3204 59, 3204 (1999).
2. L. Hilico, J. M. Courty, C. Fabre, E. Giacobino, I. Abram, and J. L. Oudar, Appl. Phys. B: Photophys. Laser Chem. APPCDL 0721-7269 10.1007/BF00325007 55, 202 (1992).
3. D. Vitali, S. Gigan, A. Ferreira, H. R. Boehm, P. Tombesi, A. Guerreiro, A. Vedral, A. Zeilinger, and M. Aspelmeyer, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.98.030405 98, 030405 (2007).
4. W. Marshall, C. Simon, R. Penrose, and D. Bouwmeester, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.91.130401 91, 130401 (2003).
5. J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, Nature (London) NATUAS 0028-0836 10.1038/nature06715 452, 72 (2008).
6. Y. Toivola, J. Thurn, R. F. Cook, G. Cibuzar, and K. Roberts, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1622776 94, 6915 (2003).
7. Norcada Inc., 4465-99 Street, Edmonton, AB, T6E 5B6, Canada (http://www.norcada.com).
8. Structure Probe Inc., P.O. Box 656, West Chester, PA 19381-0656 (http://www.2spi.com).
9. I. Katz, A. Retzker, R. Straub, and R. Lifshitz, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.99.040404 99, 040404 (2007).
10. A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations, Pure and Applied Mathematics: A Wiley-Interscience Series of Texts (Wiley, New York, 1979).
11. D. Rugar, H. J. Mamin, and P. Guethner, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.101987 55, 2588 (1989).
12. C. Zener, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.52.230 52, 230 (1937).
13. A. N. Norris and D. M. Photiadis, Q. J. Mech. Appl. Math. QJMMAV 0033-5614 10.1093/qjmamj/hbi002 58, 143 (2005).
14. G. Rempe, R. J. Thompson, H. J. Kimble, and R. Lalezari, Opt. Lett. OPLEDP 0146-9592 10.1038/017363a0 17, 363 (1992).
15. H. R. Philipp, J. Electrochem. Soc. JESOAN 0013-4651 10.1149/1.2403440 120, 295 (1973).
16. D. Poenar and R. Wolffenbuttel, Appl. Opt. APOPAI 0003-6935 36, 5122 (1997).
17. D. Rugar, R. Budakian, H. J. Mamin, and B. W. Chui, Nature (London) NATUAS 0028-0836 10.1038/nature02658 430, 329 (2004).
18. T. D. Stowe, K. Yasumura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.119522 71, 288 (1997).
19. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1927327 76, 061101 (2005).
20. X. Liu, J. F. Vignola, H. J. Simpson, B. R. Lemon, B. H. Houston, and D. M. Photiadis, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1819980 97, 023524 (2005).
21. R. N. Kleiman, G. Agnolet, and D. J. Bishop, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.59.2079 59, 2079 (1987).
22. A. Naik, O. Buu, M. D. LaHaye, A. D. Armour, A. A. Clerk, M. P. Blencowe, and K. C. Schwab, Nature (London) NATUAS 0028-0836 10.1038/nature05027 443, 193 (2006).
23. S. S. Verbridge, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2822406 92, 013112 (2008).
24. T. Kenny, IEEE Sens. J. ISJEAZ 1530-437X 10.1109/JSEN.2001.936932 1, 148 (2001).
25. P. S. Waggoner and H. G. Craighead, Lab Chip LCAHAM 1473-0197 10.1039/b707401h 7, 1238 (2007).
26. S. K. Lamoreaux, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett. 78.5 78, 5 (1997).