Novel fabrication of micromechanical oscillators with nanoscale sensitivity at room temperature

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1118-1126

  Chabot, Michelle D ^a,b   Moreland, John M ^a   Gao, Lan ^c   Liou, Sy Hwang ^c   Miller, Casey W ^d,e  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF SAN DIEGO   (United States)

^c UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^d UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cantilevers; Fabrication; Magnetic resonance force microscopy (MRFM); Magnetometry

Indexed keywords

MAGNETIC FILMS; MAGNETOMETERS; MATHEMATICAL MODELS; MILLING (MACHINING); NUCLEAR MAGNETIC RESONANCE; OSCILLATORS (MECHANICAL); PHOTOLITHOGRAPHY; SENSITIVITY ANALYSIS; SILICON; SINGLE CRYSTALS;

ION-BEAM MILLING; MAGNETOMETRY; MICROMECHANICAL OSCILLATORS; NUCLEAR MAGNETIC RESONANCE FORCE MICROSCOPY (MRFM); SINGLE-CRYSTAL SILICON CANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 27644497547     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.851869     Document Type: Article

References (29)

1. D. Rugar, B. C. Stipe, H. J. Mamin, C. S. Yannoni, T. D. Stowe, K. Y. Yasumura, and T W. Kenny, "Adventures in attonewton force detection," Appl. Phys. A. vol. 72, pp. S3-10, Mar. 2001.
2. W. Wernsdorfer, D. Mailly, and A. Benoit, "Single nanoparticle measurement techniques," J. Appl. Phys., vol. 87, pp. 5094-5096, May 2000.
3. R. P. Cowburn, D. K. Koltsov, A. O. Adeyeye, and M. E. Welland, "Probing submicron nanomagnets by magneto-optics," Appl. Phys. Lett., vol. 73, pp. 3947-3949, Dec. 1998.
4. R. H. Kock, J. G. Deak, D. W. Abraham, P. L. Trouilloud, R. A. Altman, Y. Lu, W. J. Gallagher, R. E. Scheuerlein, K. P. Roche, and S. S. P. Parkin, "Magnetization reversal in micron-sized magnetic thin films," Phys. Rev. Lett., vol. 81, pp. 4512-4515, Nov. 1998.
5. M. Lederman, S. Schultz, and M. Ozaki, "Measurement of the dynamics of the magnetization reversal in individual single-domain ferromagnetic particles," Phys. Rev. Lett., vol. 73, pp. 1986-1989, Oct. 1994.
6. S. E. Russek, S. Kaka, and M. Donahue, "High-speed dynamics, damping, and relaxation times in submicrometer spin-valve devices," J. Appl. Phys., vol. 87, pp., 7070-7072, May 2000.
7. U. Wiedwald, M. Spasova, M. Farle, M. Hilgendorff, and M. Giersig, "Ferromagnetic resonance of monodisperse Co particles," J. Vac. Sci. Technol. A, vol. 19, pp. 1773-1776, Aug. 2001.
8. M. D. Chabot and J. Moreland, "Micrometer-scale magnetometry of thin Ni-Fe films using ultra-sensitive microcantilevers," J. Appl. Phys., vol. 93, pp. 7897-7899, May 2003.
9. B. C. Stipe, H. J. Mamin, T. D. Stowe, T. W. Kenny, and D. Rugar, "Magnetic dissipation and fluctuations in individual nanomagnets measures by ultrasensitive cantilever magnetometry," Phys. Rev. Lett., vol. 86, pp. 2874-2877, Mar. 2001.
10. J. G. E. Harris, D. D. Awschalom, F. Matsukura, H. Ohno, K. D. Maranowski, and A. C. Gossard, "Integrated micromechanical cantilever magnetometry of GaMnAs," Appl. Phys. Lett., vol. 75, pp. 1140-1142, Aug. 1999.
11. M. Löhndorf, J. Moreland, P. Kabos, and N. Rizzo, "Microcantilever torque magnetometry of thin magnetic films," J. Appl. Phys., vol. 87, pp. 5995-5997, May 2000,
12. J. G. E. Harris, R. Knobel, K. D. Maranowski, A. C. Gossard, N. Samarth, and D. D. Awschalom, "Magnetization measurements of magnetic two-dimensional electron gases," Phys. Rev. Lett., vol. 86, pp. 4644-4647, May 2001.
13. C. Rossel, P. Bauer, D. Zech, J. Hofer, M. Willemin, and H. Keller, "Active microlevers as miniature torque magnetometers," J. Appl. Phys., vol. 79, pp. 8166-8173, Jun. 1996.
14. C. Lupien, B. Ellman, P. Grutter, and L. Taillefer, "Piezoresistive torque magnetometer below 1 K," Appl. Phys. Lett., vol. 74, pp. 451-453, Jan. 1999.
15. D. Rugar, C. S. Yannoni, and J. A. Sidles, "Mechanical detection of magnetic resonance," Nature, vol. 360, pp. 532-566, 1992.
16. D. Rugar, O. Zuger, S. Hoen, C. S. Yannoni, H. M. Vieth, and R. D. Kendrick, "Force detection of nuclear magnetic resonance," Science, vol. 264, pp. 1560-1563, 1994.
17. K. R. Thurber, L. E. Harrell, and D. D. Smith, "170 nm nuclear magnetic resonance imaging using magnetic resonance force microscopy," J. Mag. Res., vol. 162, pp. 336-340, 2003.
18. J. A. Sidles, J. L. Garbini, and G. P. Drobny, "The theory of oscillator-coupled magnetic resonance with potential applications to molecular imaging," Rev. Sci. Instrum., vol. 63, pp. 3881-3899, 1992.
19. D. Rudar, R. Budakin, H. J. Mamin, and B. W. Chui, "Single spin detection by magnetic resonance force microscopy," Nature, vol. 430, pp. 329-332, 2004.
20. R. N. Kleinman, G. K. Kaminsky, J. D. Reppy, R. Pindak, and D. J. Bishop, "Single-crystal silicon high-Q torsional oscillators," Rev. Sci. Instrum., vol. 56, pp. 2088-2091, 1985.
21. M. D. Chabot and J. T. Markert, "Microfabrication of single-crystal silicon multiple torsional oscillators," Proc. SPIE, vol. 3875, pp. 104-112, 1999.
22. C. L. Spiel, R. O. Pohl, and A. T. Zehnder, "Normal modes of a Si(100) double-paddle oscillator," Rev. Sci. Instrum., vol. 72, pp. 1482-1491, Feb. 2001.
23. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, "Anisotropic etching of crystalline silicon in alkaline solutions: Influence of dopants," J. Electrochem. Soc., vol. 137, pp. 3626-3632, Nov. 1990.
24. E. D. Palik. J. W. Faust Jr. H. F. Gray, and P. F. Green, "Study of the etch-stop mechanism in silicon," J. Electochem. Soc., vol. 129, pp. 2051-2058, 1982.
25. 20 arrays using ultrasensitive microcantilever torque mangnetometry," J. Appl. Phys., vol. 95, pp. 7010-7012, Jun. 2004.
26. G. Gubbiotti, L. Albini, G. Carlotti, M. De Crescenzi, E. Di Fabrizio, A. Gerardino, O. Donzelli, F. Nizzoli, H. Koo, and R. D. Gomez, "Finite size effects in patterned magnetic permalloy films?" J. Appl. Phys., vol. 87, pp. 5633-5635, May 2000.
27. J. Jorzick, S. O. Demokritov, B. Hillebrands, B. Bartenlian, C. Chappert, D. Decanini, F. Rousseaux, and E. Cambril, "Spin-wave quantization and dynamic coupling in micron-size circular magnetic dots," Appl. Phys. Lett., vol. 75, pp. 3859-3861, Dec. 1999.
28. C. W. Miller, "Nuclear Magnetic Resonance Force Microscopy: Adiabaticity, External Field Effects, and Demonstration of Magnet-on-Oscillator Detection With Sub-Micron Resolution," Ph.D. dissertation, University of Texas at Austin, 2003.
29. J.-H. Choi, U. M. Mirsaidov, C. W. Miller, Y. J. Lee, S. Guchhait, M. D. Chabot, W. Lu, and J. T. Markert, "Oscillator microfabrication, micromagnets, and magnetic resonance force microscopy," Proc. SPIE Int. Soc. Opt. Eng., vol. 5389, pp. 399-410, Jul. 2004.