-
1
-
-
36949008137
-
Micromachined high-resolution accelerometers
-
Krishnan, G., Kshirsagar, C. U., Ananthasuresh, G. K. & Bhat, N. Micromachined high-resolution accelerometers. J. Indian Inst. Sci. 87, 333-361 (2007).
-
(2007)
J. Indian Inst. Sci.
, vol.87
, pp. 333-361
-
-
Krishnan, G.1
Kshirsagar, C.U.2
Ananthasuresh, G.K.3
Bhat, N.4
-
2
-
-
0032138896
-
Micromachined inertial sensors
-
Yazdi, N., Ayazi, F. & Najafi, K. Micromachined inertial sensors. Proc. IEEE 86, 1640-1659 (1998).
-
(1998)
Proc. IEEE
, vol.86
, pp. 1640-1659
-
-
Yazdi, N.1
Ayazi, F.2
Najafi, K.3
-
3
-
-
0141607072
-
Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers
-
Acar, C. & Shkel, A. M. Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers. J. Micromech. Microeng. 13, 634-645 (2003).
-
(2003)
J. Micromech. Microeng.
, vol.13
, pp. 634-645
-
-
Acar, C.1
Shkel, A.M.2
-
4
-
-
31644445602
-
Noise analysis and characterization of a sigma-delta capacitive microaccelerometer
-
Kulah, H., Chae, J., Yazdi, N. & Najafi, K. Noise analysis and characterization of a sigma-delta capacitive microaccelerometer. IEEE J. Solid-State Circ. 41, 352-361 (2006).
-
(2006)
IEEE J. Solid-State Circ.
, vol.41
, pp. 352-361
-
-
Kulah, H.1
Chae, J.2
Yazdi, N.3
Najafi, K.4
-
5
-
-
70350674327
-
Piezoelectric MEMS sensors: State-of-the-art and perspectives
-
Tadigadapa, S. & Mateti, K. Piezoelectric MEMS sensors: state-of-the-art and perspectives. Meas. Sci. Technol. 20, 092001 (2009).
-
(2009)
Meas. Sci. Technol.
, vol.20
, pp. 092001
-
-
Tadigadapa, S.1
Mateti, K.2
-
6
-
-
0032099408
-
Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution
-
Liu, C. et al. Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution. J. Microelectromech. Syst. 7, 235-244 (1998).
-
(1998)
J. Microelectromech. Syst.
, vol.7
, pp. 235-244
-
-
Liu, C.1
-
7
-
-
40249100335
-
Oil and gas applications: Probing oil fields
-
Nakstad, H. & Kringlebotn, J. T. Oil and gas applications: probing oil fields. Nature Photon. 2, 147-149 (2008).
-
(2008)
Nature Photon.
, vol.2
, pp. 147-149
-
-
Nakstad, H.1
Kringlebotn, J.T.2
-
8
-
-
44849090017
-
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
-
Krishnamoorthy, U. et al. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. Sens. Actuat. A 145-146, 283-290 (2008).
-
(2008)
Sens. Actuat.
, vol.146 A145
, pp. 283-290
-
-
Krishnamoorthy, U.1
-
10
-
-
0036248275
-
Applications of SOI-based optical MEMS
-
Noell, W. et al. Applications of SOI-based optical MEMS. IEEE J. Sel. Top. Quantum Electron. 8, 148-154 (2002).
-
(2002)
IEEE J Sel. Top. Quantum Electron.
, vol.8
, pp. 148-154
-
-
Noell, W.1
-
11
-
-
0030409146
-
Experimental demonstration of a fiber Bragg grating accelerometer
-
Berkoff, T. A. & Kersey, A. D. Experimental demonstration of a fiber Bragg grating accelerometer. IEEE Photon. Technol. Lett. 8, 1677-1679 (1996).
-
(1996)
IEEE Photon Technol. Lett.
, vol.8
, pp. 1677-1679
-
-
Berkoff, T.A.1
Kersey, A.D.2
-
12
-
-
67349158605
-
A picogram- and nanometre-scale photonic-crystal optomechanical cavity
-
Eichenfield, M., Camacho, R., Chan, J., Vahala, K. J. & Painter, O. A picogram- and nanometre-scale photonic-crystal optomechanical cavity. Nature 459, 550-555 (2009).
-
(2009)
Nature
, vol.459
, pp. 550-555
-
-
Eichenfield, M.1
Camacho, R.2
Chan, J.3
Vahala, K.J.4
Painter, O.5
-
13
-
-
33745725576
-
High quality factor resonance at room temperature with nanostrings under high tensile stress
-
Verbridge, S. S., Parpia, J. M., Reichenbach, R. B., Bellan, L. M. & Craighead, H. G. High quality factor resonance at room temperature with nanostrings under high tensile stress. J. Appl. Phys. 99, 124304 (2006).
-
(2006)
J. Appl. Phys.
, vol.99
, pp. 124304
-
-
Verbridge, S.S.1
Parpia, J.M.2
Reichenbach, R.B.3
Bellan, L.M.4
Craighead, H.G.5
-
15
-
-
40849106445
-
Ground-state cooling of a micromechanical oscillator: Comparing cold damping and cavityassisted cooling schemes
-
Genes, C., Vitali, D., Tombesi, P., Gigan, S. & Aspelmeyer, M. Ground-state cooling of a micromechanical oscillator: comparing cold damping and cavityassisted cooling schemes. Phys. Rev. A 77, 033804 (2008).
-
(2008)
Phys. Rev.
, vol.A77
, pp. 033804
-
-
Genes, C.1
Vitali, D.2
Tombesi, P.3
Gigan, S.4
Aspelmeyer, M.5
-
16
-
-
35348997929
-
Optical dilution and feedback cooling of a gram-scale oscillator to 6.9 mK
-
Corbitt, T. et al. Optical dilution and feedback cooling of a gram-scale oscillator to 6.9 mK. Phys. Rev. Lett. 99, 160801 (2007).
-
(2007)
Phys. Rev. Lett.
, vol.99
, pp. 160801
-
-
Corbitt, T.1
-
17
-
-
69549097714
-
Mechanical oscillation and cooling actuated by the optical gradient force
-
Lin, Q., Rosenberg, J., Jiang, X., Vahala, K. J. & Painter, O. Mechanical oscillation and cooling actuated by the optical gradient force. Phys. Rev. Lett. 103, 103601 (2009).
-
(2009)
Phys. Rev. Lett.
, vol.103
, pp. 103601
-
-
Lin, Q.1
Rosenberg, J.2
Jiang, X.3
Vahala, K.J.4
Painter, O.5
-
21
-
-
78650991307
-
Measuring nanomechanical motion with an imprecision below the standard quantum limit
-
R
-
Anetsberger, G. et al. Measuring nanomechanical motion with an imprecision below the standard quantum limit. Phys. Rev. A 82, 061804(R) (2010).
-
(2010)
Phys. Rev.
, vol.A82
, pp. 061804
-
-
Anetsberger, G.1
-
22
-
-
33750595448
-
Sub-kelvin optical cooling of a micromechanical resonator
-
Kleckner, D. & Bouwmeester, D. Sub-kelvin optical cooling of a micromechanical resonator. Nature 444, 75-78 (2006).
-
(2006)
Nature
, vol.444
, pp. 75-78
-
-
Kleckner, D.1
Bouwmeester, D.2
-
23
-
-
0033892144
-
Quality factors in micron- and submicron-thick cantilevers
-
Yasumura, K. Y. et al. Quality factors in micron- and submicron-thick cantilevers. J. Microelectromech. Syst. 9, 117-125 (2000).
-
(2000)
J. Microelectromech. Syst.
, vol.9
, pp. 117-125
-
-
Yasumura, K.Y.1
-
24
-
-
34247253338
-
An optical fiber-taper probe for wafer-scale microphotonic device characterization
-
Michael, C. P., Borselli, M., Johnson, T. J., Chrystal, C. & Painter, O. An optical fiber-taper probe for wafer-scale microphotonic device characterization. Opt. Express 15, 4745-4752 (2007).
-
(2007)
Opt. Express
, vol.15
, pp. 4745-4752
-
-
Michael, C.P.1
Borselli, M.2
Johnson, T.J.3
Chrystal, C.4
Painter, O.5
-
26
-
-
0024769604
-
Accelerometer systems with self-testable features
-
Allen, H. V., Terry, S. C. & De Bruin, D. W. Accelerometer systems with self-testable features. Sens. Actuat. 20, 153-161 (1989).
-
(1989)
Sens. Actuat.
, vol.20
, pp. 153-161
-
-
Allen, H.V.1
Terry, S.C.2
De Bruin, D.W.3
-
27
-
-
69949093519
-
Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity
-
Camacho, R. M., Chan, J., Eichenfield, M. & Painter, O. Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity. Opt. Express 17, 15726-15735 (2009).
-
(2009)
Opt. Express
, vol.17
, pp. 15726-15735
-
-
Camacho, R.M.1
Chan, J.2
Eichenfield, M.3
Painter, O.4
-
29
-
-
82955226375
-
A chip-scale integrated cavity-electro-optomechanics platform
-
Winger, M. et al. A chip-scale integrated cavity-electro-optomechanics platform. Opt. Express 19, 24905-24921 (2011).
-
(2011)
Opt. Express
, vol.19
, pp. 24905-24921
-
-
Winger, M.1
-
30
-
-
4043095324
-
Noncontact friction and force fluctuations between closely spaced bodies
-
Stipe, B. C., Mamin, H. J., Stowe, T. D., Kenny, T. W. & Rugar, D. Noncontact friction and force fluctuations between closely spaced bodies. Phys. Rev. Lett. 096801 (2001).
-
(2001)
Phys. Rev. Lett.
, pp. 096801
-
-
Stipe, B.C.1
Mamin, H.J.2
Stowe, T.D.3
Kenny, T.W.4
Rugar, D.5
|