Theoretical Modeling of ALD Processes

Atomic Layer Deposition of Nanostructured Materials

Volumn , Issue , 2012, Pages 1-21

  Musgrave, Charles B ^a  

^a University of Colorado at Boulder   (United States)

Author keywords

Adsorption energy; Atomic layer deposition; Chemical mechanism; Density functional theory; Molecular dynamics; Potential energy surface; Surface reactions; Transition states

Indexed keywords

EID: 84883957068     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527639915.ch1     Document Type: Chapter

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