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ECS Journal of Solid State Science and Technology

Volumn 1, Issue 6, 2012, Pages

Atomic layer deposition and characterization of amorphous Er xTi1-xOy Dielectric Ultra-Thin Films

(2) Xua, Runshen a Takoudis, Christos G a,b

a University of Illinois at Chicago (United States)

b University of Illinois at Chicago (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84882968036 PISSN: 21628769 EISSN: 21628777 Source Type: Journal
DOI: 10.1149/2.013206jss Document Type: Article

Times cited : (15)

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