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Journal of the Electrochemical Society

Volumn 156, Issue 2, 2009, Pages

Composition-dependent structural and electrical properties of Zr xTiy O2films grown on Ru O2 substrate by ALD

(4) Kwon, Hyuk a Park, Hyun Hee a Kim, Byong Ho a Ha, Jeong Sook a

a Korea University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC CAPACITORS; DIELECTRIC WAVEGUIDES; ELECTRIC PROPERTIES; LEAKAGE (FLUID); OXIDE MINERALS; OXYGEN; PERMITTIVITY; RUTHENIUM COMPOUNDS; TITANIUM OXIDES; ZIRCONIUM;

ATOMIC LAYERS; CYCLE RATIOS; DIELECTRIC CONSTANTS; ELECTRICAL PROPERTIES; O2 PHASE; OXYGEN SOURCES; POSTANNEALING; RUTILE STRUCTURES;

PHYSICAL VAPOR DEPOSITION;

EID: 58049088384 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3033500 Document Type: Article

Times cited : (6)

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