The optical properties of hydrophilic Hf-doped HfO2 nanoceramic films

Ceramics International

Volumn 39, Issue 7, 2013, Pages 7677-7683

  Lin, Su Shia ^a   Li, Han Ru ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Film; Hydrophilicity; Sputtering; Transmission

Indexed keywords

DC MAGNETRON SPUTTERING; HF-DOPED; NANO CERAMICS; NEAR INFRARED REGION; OXIDATION STATE; RF-MAGNETRON SPUTTERING; ULTRAVIOLET REGION;

FILMS; HAFNIUM OXIDES; HYDROPHILICITY; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SEMICONDUCTOR DOPING; SPUTTERING; TRANSMISSIONS;

HAFNIUM;

EID: 84880321414     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2013.03.020     Document Type: Article

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