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Journal of Crystal Growth

Volumn 281, Issue 2-4, 2005, Pages 452-457

Crystalline phases, microstructures and electrical properties of hafnium oxide films deposited by sol-gel method

(6) Wang, Zhan Jie a Kumagai, Toshihide a Kokawa, Hiroyuki a Tsuaur, Jiunnjye b Ichiki, Masaaki b Maeda, Ryutaro b

a TOHOKU UNIVERSITY (Japan)

b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

A1. Crystal structure; A1. X ray diffraction; B1. Oxides; B2. Dielectric materials

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; CURRENT DENSITY; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC PROPERTIES; FILM GROWTH; GRAIN SIZE AND SHAPE; HAFNIUM COMPOUNDS; MICROSTRUCTURE; OXIDES; SOL-GELS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CURRENT-VOLTAGE MEASUREMENTS; HAFNIUM OXIDES; LEAKAGE CURRENT DENSITY; SPHERULITE GRAIN STRUCTURE;

THIN FILMS;

EID: 22144476901 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2005.04.036 Document Type: Article

Times cited : (28)

References (20)

1
- 0027684648
- A.J. Waldorf, J.A. Dobrowolski, B.T. Sullivan, and L.M. Plante Appl. Opt. 32 1993 5583
- (1993) Appl. Opt. , vol.32 , pp. 5583
- Waldorf, A.J.¹ Dobrowolski, J.A.² Sullivan, B.T.³ Plante, L.M.⁴

2
- 0032628330
- M. Gilo, and N. Croitoru Thin Solid Films 350 1999 203
- (1999) Thin Solid Films , vol.350 , pp. 203
- Gilo, M.¹ Croitoru, N.²

3
- 4544294836
- J. Aarik, H. Mandar, M. Kirm, and L. Pung Thin Solid Films 466 2004 41
- (2004) Thin Solid Films , vol.466 , pp. 41
- Aarik, J.¹ Mandar, H.² Kirm, M.³ Pung, L.⁴

4
- 0035872897
- G.D. Wilk, R.M. Wallace, and J.M. Anthony J. Appl. Phys. 89 2001 5243
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

5
- 0036494032
- S. Sayan, S. Aravamudhan, B.W. Busch, W.H. Schulte, F. Cosandey, G.D. Wilk, T. Gustafsson, and E. Garfunfel J. Vac. Sci. Technol. A 20 2002 507
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 507
- Sayan, S.¹ Aravamudhan, S.² Busch, B.W.³ Schulte, W.H.⁴ Cosandey, F.⁵ Wilk, G.D.⁶ Gustafsson, T.⁷ Garfunfel, E.⁸

6
- 22144497986
- in press
- J. Tsuaur, K. Onodera, T. Kobayashi, Z.J. Wang, S. Heisig, R. Maeda, T. Suga, Sensors Actuators A (2005) in press.
- (2005) Sensors Actuators A
- Tsuaur, J.¹ Onodera, K.² Kobayashi, T.³ Wang, Z.J.⁴ Heisig, S.⁵ Maeda, R.⁶ Suga, T.⁷

7
- 0035894001
- A. Callegari, E. Cartier, M. Gribelyuk, H.F. Okorn-Schmidt, and T. Zabel J. Appl. Phys. 90 2001 6466
- (2001) J. Appl. Phys. , vol.90 , pp. 6466
- Callegari, A.¹ Cartier, E.² Gribelyuk, M.³ Okorn-Schmidt, H.F.⁴ Zabel, T.⁵

8
- 0033705916
- T. Nishide, S. Honda, M. Matsuura, and M. Ide Thin Solid Films 371 2000 61
- (2000) Thin Solid Films , vol.371 , pp. 61
- Nishide, T.¹ Honda, S.² Matsuura, M.³ Ide, M.⁴

9
- 1942420039
- K. Kukli, M. Ritala, M. Leskela, T. Sajavaara, J. Keinonen, A.C. Jones, and J.L. Roberts Chem. Vap. Deposit. 9 2003 315
- (2003) Chem. Vap. Deposit. , vol.9 , pp. 315
- Kukli, K.¹ Ritala, M.² Leskela, M.³ Sajavaara, T.⁴ Keinonen, J.⁵ Jones, A.C.⁶ Roberts, J.L.⁷

10
- 22144491773
- A. Abrutis, L.G. Hubert-Pfalzagraf, S.V. Pasko, A. Bartasyte, F. Weiss, and V. Janickis J. Crystal Growth 267 2004 539
- (2004) J. Crystal Growth , vol.267 , pp. 539
- Abrutis, A.¹ Hubert-Pfalzagraf, L.G.² Pasko, S.V.³ Bartasyte, A.⁴ Weiss, F.⁵ Janickis, V.⁶

11
- 0003762220
- Gordon and Breach Science Publisher Netherlands
- J.D. Wright, and N.A.J.M. Sommerdijk Sol-Gel Materials Chemistry and Applications 2001 Gordon and Breach Science Publisher Netherlands
- (2001) Sol-gel Materials Chemistry and Applications
- Wright, J.D.¹ Sommerdijk, N.A.J.M.²

12
- 10844247833
- H. Shimizu, K. Asayama, N. Kawai, and T. Nishide Jpn. J. Appl. Phys. 43 2004 6992
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 6992
- Shimizu, H.¹ Asayama, K.² Kawai, N.³ Nishide, T.⁴

13
- 22144466444
- JCPDS Card No. 6-0318, Joint Committee for Powder Diffraction Standards, Swarthmore, Pennsylvania, 1984
- JCPDS Card No. 6-0318, Joint Committee for Powder Diffraction Standards, Swarthmore, Pennsylvania, 1984.

14
- 0028517695
- M. Ritala, M. Leskela, L. Niinisto, T. Prohaska, G. Friedbacher, and M. Grasserbauer Thin Solid Films 250 1994 72
- (1994) Thin Solid Films , vol.250 , pp. 72
- Ritala, M.¹ Leskela, M.² Niinisto, L.³ Prohaska, T.⁴ Friedbacher, G.⁵ Grasserbauer, M.⁶

15
- 0032653080
- J. Aarik, A. Aidla, A.-A. Kiisler, T. Uustare, and V. Sammelselg Thin Solid Films 340 1999 110
- (1999) Thin Solid Films , vol.340 , pp. 110
- Aarik, J.¹ Aidla, A.² Kiisler, A.-A.³ Uustare, T.⁴ Sammelselg, V.⁵

16
- 0037321524
- M.-Y. Ho, H. Gong, G.D. Wilk, B.W. Busch, M.L. Green, P.M. Voyles, D.A. Muller, M. Bude, W.H. Lin, A. See, M.E. Loomans, S.K. Lahiri, and P.I. Raisanen J. Appl. Phys. 93 2003 1477
- (2003) J. Appl. Phys. , vol.93 , pp. 1477
- Ho, M.-Y.¹ Gong, H.² Wilk, G.D.³ Busch, B.W.⁴ Green, M.L.⁵ Voyles, P.M.⁶ Muller, D.A.⁷ Bude, M.⁸ Lin, W.H.⁹ See, A.¹⁰ Loomans, M.E.¹¹ Lahiri, S.K.¹² Raisanen, P.I.¹³

17
- 0036567727
- S.-W. Nam, J.-H. Yoo, S. Nam, H.-J. Choi, D. Lee, D.H. Ko, J.H. Moon, J.-H. Ku, and S. Choi J. Non-Cryst. Solids 303 2002 139
- (2002) J. Non-Cryst. Solids , vol.303 , pp. 139
- Nam, S.-W.¹ Yoo, J.-H.² Nam, S.³ Choi, H.-J.⁴ Lee, D.⁵ Ko, D.H.⁶ Moon, J.H.⁷ Ku, J.-H.⁸ Choi, S.⁹

18
- 0034507025
- Z.J. Wang, R. Maeda, and K. Kikuchi J. Mater. Sci. 35 2000 5915
- (2000) J. Mater. Sci. , vol.35 , pp. 5915
- Wang, Z.J.¹ Maeda, R.² Kikuchi, K.³

19
- 1042298583
- D.P. Norton Mater. Sci. Eng. R 43 2004 139
- (2004) Mater. Sci. Eng. R , vol.43 , pp. 139
- Norton, D.P.¹

20
- 1242321037
- M.-K. Song, S.-W. Kang, and S.-W. Rhee Thin Solid Films 450 2004 272
- (2004) Thin Solid Films , vol.450 , pp. 272
- Song, M.-K.¹ Kang, S.-W.² Rhee, S.-W.³

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