Annealing effects on opto-electronic properties of sputtered and thermally evaporated indium-tin-oxide films

Thin Solid Films

Volumn 312, Issue 1-2, 1998, Pages 268-272

  Morgan, D V ^a   Aliyu, Y H ^a   Bunce, R W ^a   Salehi, A ^a  

^a CARDIFF UNIVERSITY   (United Kingdom)

Author keywords

Indium tin oxide; Opto electronic property; Post deposition annealing

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTER DEPOSITION; TRANSPARENCY; X RAY DIFFRACTION ANALYSIS;

INDIUM TIN OXIDE (ITO) FILMS;

SEMICONDUCTING FILMS;

EID: 0031702268     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00733-5     Document Type: Article

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