Highly oriented ZnO thin films deposited on Ru/Si substrates

Thin Solid Films

Volumn 353, Issue 1, 1999, Pages 12-15

  Taeg Lim, Won ^a   Hyo Lee, Chang ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; FILM GROWTH; FILM PREPARATION; PRESSURE; RUTHENIUM; SILICON; SPUTTER DEPOSITION; STRESSES; ZINC OXIDE;

BIAXIAL STRESS; CRYSTALLITE SIZE; STRUCTURAL PROPERTIES;

THIN FILMS;

EID: 0005762811     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00390-9     Document Type: Article

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