Soft x-ray photoemission studies of Hf oxidation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 106-109

  Suzer, S ^a   Sayan, S ^b   Banaszak Holl, M M ^c   Garfunkel, E ^b   Hussain, Z ^d   Hamdan, N M ^d  

^a BILKENT UNIVERSITY   (Turkey)

^b RUTGERS UNIVERSITY   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; FERMI LEVEL; OXIDATION; PHOTOEMISSION; POLYCRYSTALLINE MATERIALS; SPECTROSCOPY;

HAFNIUM DIOXIDE; POLYCRYSTALLINE HAFNIUM FOIL; SOFT X RAY PHOTOEMISSION SPECTROSCOPY; VALENCE BAND OFFSET;

HAFNIUM COMPOUNDS;

EID: 0037278845     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1525816     Document Type: Article

References (15)

1. D. D. Sarma and C. N. R. Rao, J. Electron Spectrosc. Relat. Phenom. 20, 25 (1980).
2. R. Nyholm, A. Berndtsson, and N. Martensson, J. Phys. C 13, L1091 (1980).
3. C. D. Wagner et al., Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Physical Electronics Division, Eden Prairie, MN, 1979)
4. C. Morant, L. Galan, and J. M. Sanz, Surf. Interface Anal. 16, 304 (1990).
5. C. T. Hsu, Y. K. Su, and M. Yokoyama, Jpn. J. Appl. Phys., Part 1 31, 2501 (1992).
6. G. D. Wilk and R. M. Wallace, Appl. Phys. Lett. 74, 2854 (1999).
7. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 87, 484 (2000)
8. V. Cosnier, M. Olivier, G. Theret, and B. Andre, J. Vac. Sci. Technol. A 19, 2267 (2001)
9. A. I. Kingon, J. P. Maria, and S. K. Streiffer, Nature (London) 406, 1032 (2000).
10. S. Sayan, E. Garfunkel, and S. Suzer, J. Appl. Phys. 80, 2135 (2002).
11. M. Belyansky and M. Trenary, J. Vac. Sci. Technol. A 15, 3065 (1997).
12. H. Lee, S. Jeon, and H. Hwang, Appl. Phys. Lett. 79, 2615 (2001).
13. N. Martensson et al., Phys. Rev. B 39, 8181 (1989).
14. R. Nyholm and J. Schmidt-May, J. Phys. C 17 L113 (1984).
15. W. F. Egelhoff,Jr., Surf. Sci. Rep. 6 253 (1987).