Plasma interaction with Zn nano layer on organic materials for analysis of early stage of inorganic/organic hybrid multi-layer formation

Surface and Coatings Technology

Volumn 228, Issue SUPPL.1, 2013, Pages

  Cho, Ken ^a   Takenaka, Kosuke ^a   Setsuhara, Yuichi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Hard X ray photoelectron spectroscopy; Inductively coupled plasma; Low damage process; Low inductance antenna; Polymer

Indexed keywords

CHEMICAL BONDING STATE; HARD X-RAY PHOTOELECTRON SPECTROSCOPY; INORGANIC/ORGANIC HYBRID; LOW-INDUCTANCE ANTENNA; NON DESTRUCTIVE; ORGANIC MATERIALS; OXIDATION OF ZN; SPECTRA MEASUREMENTS;

CHEMICAL BONDS; INDUCTIVELY COUPLED PLASMA; MIXTURES; PHOTOELECTRONS; PLASMA INTERACTIONS; POLYMERS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS; ZINC;

INTERFACE STATES;

EID: 84879796335     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.05.126     Document Type: Article

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