Effects of antenna size and configurations in large-area RF plasma production with internal low-inductance antenna units

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8042-8045

  Deguchi, Hiroshige ^a   Yoneda, Hitoshi ^a   Kato, Kenji ^a   Kubota, Kiyoshi ^a   Hayashi, Tsukasa ^a   Ogata, Kiyoshi ^a   Ebe, Akinori ^b   Takenaka, Kosuke ^c   Setsuhara, Yuichi ^c  

^a NISSIN ELECTRIC CO LTD   (Japan)

^b EMD Corporation   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Antenna size; Configuration; Low inductance internal antenna; Plasma sources

Indexed keywords

ANTENNAS; INDUCTANCE; LIQUID CRYSTAL DISPLAYS; PLASMA SOURCES;

ANTENNA SIZE; LOW-INDUCTANCE INTERNAL ANTENNA;

INDUCTIVELY COUPLED PLASMA;

EID: 34547911074     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8042     Document Type: Article

References (14)

1. B. P. Wood, I. Henins, R. J. Gobble, W. A. Reass, R. J. Faehl, M. A. Nastasi and D. J. Rej: J. Vac. Sci. Technol. B 12 (1994) 870.
2. J. Hopwood: Plasma Sources Sci. Technol. 1 (1992) 109.
3. K. Suzuki, S. Okudaira, N. Sakudo and I. Kanomata: Jpn. J. Appl. Phys. 16 (1977) 1979.
4. S. Matsuo and Y. Adachi: Jpn. J. Appl. Phys. 21 (1982) L4.
5. M. Misina, Y. Setsuhara and S. Miyake: J. Vac. Sci. Technol. A 15 (1997) 1922.
6. M. Misina, Y. Setsuhara and S. Miyake: Jpn. J. Appl. Phys. 36 (1997) 3629.
7. M. Moisan, C. Baudry and P. Leprince: IEEE Trans. Plasma Sci. 3 (1975) 55.
8. M. A. Lieberman and A. J. Lichtenberg: Principles of Plasma Discharges and Materials Processing (Wiley, NewYork, 1994).
9. Y. Setsuhara: J. Plasma Fusion Res. 81 (2005) 85 [in Japanese].
10. Y. Setsuhara, S. Miyake, Y. Sakawa and T. Shoji: Jpn. J. Appl. Phys. 38 (1999) 4263.
11. S. Miyake, Y. Setsuhara, Y. Sakawa and T. Shoji: Vacuum 59 (2000) 472.
12. S. Miyake, Y. Setsuhara, Y. Sakawa and T. Shoji: Surf. Coat. Technol. 131 (2000) 171.
13. Y. Setsuhara, S. Miyake, Y. Sakawa and T. Shoji: Surf. Coat. Technol. 136 (2001) 60.
14. Y. Setsuhara, T. Shoji, A. Ebe, S. Baba, N. Yamamoto, K. Takahashi, K. Ono and S. Miyake: Surf. Coat. Technol. 174-175 (2003) 33.