Large-area and low-damage processes for hybrid flexible device fabrications with reactive high-density plasmas driven by multiple low-inductance antenna modules

Journal of Physics: Conference Series

Volumn 165, Issue , 2009, Pages

  Setsuhara, Yuichi ^a,b   Takenaka, Kosuke ^a,b   Cho, Ken ^a   Han, Jeon G ^c  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 67650692783     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/165/1/012042     Document Type: Conference Paper

References (7)

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