메뉴 건너뛰기




Volumn 84, Issue , 2013, Pages 198-204

Flexible double gate a-IGZO TFT fabricated on free standing polyimide foil

Author keywords

Amorphous indium gallium zinc oxide; Double gate transistor; Flexible electronics; Plastic substrates; Thin film transistor

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SEMICONDUCTORS; CAPACITANCE; CARRIER MOBILITY; DYNAMIC RANDOM ACCESS STORAGE; FABRICATION; FIELD EFFECT TRANSISTORS; FLEXIBLE ELECTRONICS; GALLIUM ALLOYS; INDIUM; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING ORGANIC COMPOUNDS; SUBSTRATES; TENSILE STRAIN; THIN FILM CIRCUITS; THIN FILMS; THRESHOLD VOLTAGE; TRANSISTORS; ZINC; ZINC OXIDE;

EID: 84879505018     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2013.02.025     Document Type: Article
Times cited : (53)

References (29)
  • 1
    • 78649887272 scopus 로고    scopus 로고
    • Wearable electronics: Woven electronic fibers with sensing and display functions for smart textiles (Adv Mater 45/2010)
    • Cherenack K, Zysset C, Kinkeldei T, Münzenrieder N, Tröster G. Wearable electronics: woven electronic fibers with sensing and display functions for smart textiles (Adv Mater 45/2010). Adv Mater 2010;22:5071.
    • (2010) Adv Mater , vol.22 , pp. 5071
    • Cherenack, K.1    Zysset, C.2    Kinkeldei, T.3    Münzenrieder, N.4    Tröster, G.5
  • 2
    • 0030662394 scopus 로고    scopus 로고
    • Patterning electronics on the cheap
    • DOI 10.1126/science.278.5337.383
    • Service RF. Patterning electronics on the cheap. Science 1997;278:383-4. (Pubitemid 27454399)
    • (1997) Science , vol.278 , Issue.5337 , pp. 383-384
    • Service, R.F.1
  • 3
    • 0000456092 scopus 로고    scopus 로고
    • Field-effect transistors based on thiophene hexamer analogues with diminished electron donor strength
    • Li W, Katz H, Lovinger A, Laquindanum J. Field-effect transistors based on thiophene hexamer analogues with diminished electron donor strength. Chem Mater 1999;11:458-65. (Pubitemid 129687530)
    • (1999) Chemistry of Materials , vol.11 , Issue.2 , pp. 458-465
    • Li, W.1    Katz, H.E.2    Lovinger, A.J.3    Laquindanum, J.G.4
  • 4
    • 36149000640 scopus 로고    scopus 로고
    • Amorphous-silicon thin-film transistors fabricated at 300°C on a free-standing foil substrate of clear plastic
    • DOI 10.1109/LED.2007.907411
    • Cherenack K, Kattamis A, Hekmatshoar B, Sturm J, Wagner S. Amorphoussilicon thin-film transistors fabricated at 300 °C on a free-standing foil substrate of clear plastic. IEEE Electron Dev Lett 2007;28:1004-6. (Pubitemid 350111795)
    • (2007) IEEE Electron Device Letters , vol.28 , Issue.11 , pp. 1004-1006
    • Cherenack, K.H.1    Kattamis, A.Z.2    Hekmatshoar, B.3    Sturm, J.C.4    Wagner, S.5
  • 5
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • Nomura K, Ohta H, Takagi A, Kamiya T, Hirano M, Hosono H. Roomtemperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature 2004;432:488-92. (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 7
    • 79954584267 scopus 로고    scopus 로고
    • Dual gate indium-gallium- zinc-oxide thin film transistor with an unisolated floating metal gate for threshold voltage modulation and mobility enhancement
    • Zan H, Chen W, Yeh C, Hsueh H, Tsai C, Meng H. Dual gate indium-gallium- zinc-oxide thin film transistor with an unisolated floating metal gate for threshold voltage modulation and mobility enhancement. Appl Phys Lett 2011;98. p. 153506.
    • (2011) Appl Phys Lett , vol.98 , pp. 153506
    • Zan, H.1    Chen, W.2    Yeh, C.3    Hsueh, H.4    Tsai, C.5    Meng, H.6
  • 8
    • 70549111131 scopus 로고    scopus 로고
    • High-performance InGaZnO thin-film transistors using HfLaO gate dielectric
    • Su N, Wang S, Chin A. High-performance InGaZnO thin-film transistors using HfLaO gate dielectric. IEEE Electron Dev Lett 2009;30:1317-9.
    • (2009) IEEE Electron Dev Lett , vol.30 , pp. 1317-1319
    • Su, N.1    Wang, S.2    Chin, A.3
  • 10
    • 64349105658 scopus 로고    scopus 로고
    • Lowvoltage InGaZnO thin-film transistors with ALO gate insulator grown by atomic layer deposition
    • Kim J, Fuentes-Hernandez C, Potscavage Jr W, Zhang X, Kippelen B. Lowvoltage InGaZnO thin-film transistors with ALO gate insulator grown by atomic layer deposition. Appl Phys Lett 2009;94:142107.
    • (2009) Appl Phys Lett , vol.94 , pp. 142107
    • Kim, J.1    Fuentes-Hernandez, C.2    Potscavage, J.W.3    Zhang, X.4    Kippelen, B.5
  • 11
    • 0030086564 scopus 로고    scopus 로고
    • Kinetics and modeling of wet etching of aluminum oxide by warm phosphoric acid
    • Zhou B, Ramirez W. Kinetics and modeling of wet etching of aluminum oxide by warm phosphoric acid. J Electrochem Soc 1996;143:619-23. (Pubitemid 126597348)
    • (1996) Journal of the Electrochemical Society , vol.143 , Issue.2 , pp. 619-623
    • Zhou, B.1    Ramirez, W.F.2
  • 12
    • 69049093543 scopus 로고    scopus 로고
    • Charge trapping and detrapping characteristics in amorphous InGaZnO TFTs under static and dynamic stresses
    • Cho I, Lee J, Lee J, Kwon H. Charge trapping and detrapping characteristics in amorphous InGaZnO TFTs under static and dynamic stresses. Semicond Sci Technol 2008;24:015013.
    • (2008) Semicond Sci Technol , vol.24 , pp. 015013
    • Cho, I.1    Lee, J.2    Lee, J.3    Kwon, H.4
  • 13
    • 0035506259 scopus 로고    scopus 로고
    • A novel self-aligned double-gate TFT technology
    • DOI 10.1109/55.962653, PII S0741310601094101
    • Zhang S, Han R, Sin J, Chan M. A novel self-aligned double-gate TFT technology. IEEE Electron Dev Lett 2001;22:530-2. (Pubitemid 33106091)
    • (2001) IEEE Electron Device Letters , vol.22 , Issue.11 , pp. 530-532
    • Zhang, S.1    Han, R.2    Sin, J.K.O.3    Chan, M.4
  • 14
  • 15
    • 79959515259 scopus 로고    scopus 로고
    • The effects of mechanical bending and illumination on the performance of flexible IGZO TFTs
    • Münzenrieder N, Cherenack K, Tröster G. The effects of mechanical bending and illumination on the performance of flexible IGZO TFTs. IEEE Trans Electron Dev 2011;58:2041-8.
    • (2011) IEEE Trans Electron Dev , vol.58 , pp. 2041-2048
    • Münzenrieder, N.1    Cherenack, K.2    Tröster, G.3
  • 16
    • 67650156081 scopus 로고    scopus 로고
    • Constant-voltage-bias stress testing of a-IGZO thin-film transistors
    • Hoshino K, Hong D, Chiang H, Wager J. Constant-voltage-bias stress testing of a-IGZO thin-film transistors. IEEE Trans Electron Dev 2009;56:1365-70.
    • (2009) IEEE Trans Electron Dev , vol.56 , pp. 1365-1370
    • Hoshino, K.1    Hong, D.2    Chiang, H.3    Wager, J.4
  • 17
    • 51349141239 scopus 로고    scopus 로고
    • Bias-stress-induced stretched-exponential time dependence of threshold voltage shift in InGaZnO thin film transistors
    • Lee J, Cho I, Lee J, Kwon H. Bias-stress-induced stretched-exponential time dependence of threshold voltage shift in InGaZnO thin film transistors. Appl Phys Lett 2008;93. p. 093504.
    • (2008) Appl Phys Lett , vol.93 , pp. 093504
    • Lee, J.1    Cho, I.2    Lee, J.3    Kwon, H.4
  • 18
    • 38549145327 scopus 로고    scopus 로고
    • Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors
    • Suresh A, Muth J. Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors. Appl Phys Lett 2008;92. p. 033502.
    • (2008) Appl Phys Lett , vol.92 , pp. 033502
    • Suresh, A.1    Muth, J.2
  • 19
    • 71949116567 scopus 로고    scopus 로고
    • Environment-dependent metastability of passivationfree indium zinc oxide thin film transistor after gate bias stress
    • Liu P, Chou Y, Teng L. Environment-dependent metastability of passivationfree indium zinc oxide thin film transistor after gate bias stress. Appl Phys Lett 2009;95. p. 233504.
    • (2009) Appl Phys Lett , vol.95 , pp. 233504
    • Liu, P.1    Chou, Y.2    Teng, L.3
  • 20
    • 39749191514 scopus 로고    scopus 로고
    • Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water
    • Park J, Jeong J, Chung H, Mo Y, Kim H. Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water. Appl Phys Lett 2008;92. p. 072104.
    • (2008) Appl Phys Lett , vol.92 , pp. 072104
    • Park, J.1    Jeong, J.2    Chung, H.3    Mo, Y.4    Kim, H.5
  • 22
    • 52949097961 scopus 로고    scopus 로고
    • Origin of threshold voltage instability in indium-gallium-zinc oxide thin film transistors
    • Jeong J, Won Yang H, Jeong J, Mo Y, Kim H. Origin of threshold voltage instability in indium-gallium-zinc oxide thin film transistors. Appl Phys Lett 2008;93. p. 123508.
    • (2008) Appl Phys Lett , vol.93 , pp. 123508
    • Jeong, J.1    Won, Y.H.2    Jeong, J.3    Mo, Y.4    Kim, H.5
  • 24
    • 84862551069 scopus 로고    scopus 로고
    • 3 layers on amorphous-indium-gallium-zinc oxide thin films for memory application
    • 3 layers on amorphous-indium-gallium-zinc oxide thin films for memory application. Appl Phys Lett 2012;100:183503.
    • (2012) Appl Phys Lett , vol.100 , pp. 183503
    • Jung, J.1    Rha, S.2    Kim, U.3    Chung, Y.4    Jung, Y.5    Choi, J.6
  • 25
    • 84864748287 scopus 로고    scopus 로고
    • Design rules for IGZO logic gates on plastic foil enabling operation at bending radii of 3.5 mm
    • Münzenrieder N, Zysset C, Kinkeldei T, Tröster G. Design rules for IGZO logic gates on plastic foil enabling operation at bending radii of 3.5 mm. IEEE Trans Electron Dev 2012;59:2153-9.
    • (2012) IEEE Trans Electron Dev , vol.59 , pp. 2153-2159
    • Münzenrieder, N.1    Zysset, C.2    Kinkeldei, T.3    Tröster, G.4
  • 26
    • 0000386312 scopus 로고    scopus 로고
    • A-Si: H thin film transistors after very high strain
    • Gleskova H, Wagner S, Suo Z. a-Si: H thin film transistors after very high strain. J Non-Cryst Solids 2000;266-269:1320-4.
    • (2000) J Non-Cryst Solids , vol.266-269 , pp. 1320-1324
    • Gleskova, H.1    Wagner, S.2    Suo, Z.3
  • 27
    • 84865057549 scopus 로고    scopus 로고
    • Mechanical bending of flexible complementary inverters based on organic and oxide thin film transistors
    • Kim D, Hwang B, Park J, Jeon H, Bae B, Lee H, et al. Mechanical bending of flexible complementary inverters based on organic and oxide thin film transistors. Org Electron 2012.
    • (2012) Org Electron
    • Kim, D.1    Hwang, B.2    Park, J.3    Jeon, H.4    Bae, B.5    Lee, H.6
  • 28
  • 29
    • 0017020057 scopus 로고
    • The structure and mechanical properties of physically vapor deposited chromium
    • Reiley T, Nix W. The structure and mechanical properties of physically vapor deposited chromium. Metall Mater Trans A 1976;7:1695-701.
    • (1976) Metall Mater Trans a , Issue.7 , pp. 1695-1701
    • Reiley, T.1    Nix, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.