Development of an SU-8 MEMS process with two metal electrodes using amorphous silicon as a sacrificial material

Journal of Micromechanics and Microengineering

Volumn 23, Issue 3, 2013, Pages

  Ramadan, Khaled S ^a   Nasr, Tarek ^b   Foulds, Ian G ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL EXCITATION; ELECTROSTATIC ACTUATION; MICRO FLUIDIC APPLICATIONS; PROCESS PARAMETERS; SACRIFICIAL MATERIAL; STRUCTURAL LAYERS; SURFACE MICROMACHINING PROCESS; VARIABLE CAPACITOR;

BIOCOMPATIBILITY; CAPACITORS; ELECTRIC SWITCHES; ELECTRODES; ELECTROSTATIC ACTUATORS; MECHANICAL PROPERTIES;

AMORPHOUS SILICON;

EID: 84878054204     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/3/035037     Document Type: Article

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