Fabrication of SU-8 low frequency electrostatic energy harvester

2011 International Conference on Energy Aware Computing, ICEAC 2011

Volumn , Issue , 2011, Pages

  Ramadan, Khaled ^a   Foulds, Ian G ^a  

^a KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

Author keywords

Electrostatic generator; Energy Harvester; low frequency; Thick SU 8

Indexed keywords

AMBIENT VIBRATIONS; AREA EFFICIENT; ELECTROSTATIC ENERGIES; ENERGY HARVESTER; GAP CLOSING; INPUT VIBRATIONS; LOW FREQUENCY; OUT-OF-PLANE; OUTPUT POWER DENSITY; PROOF MASS; THICK SU-8;

ELECTROSTATIC GENERATORS; ENERGY MANAGEMENT; ENERGY RESOURCES;

ENERGY HARVESTING;

EID: 84856846464     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEAC.2011.6136689     Document Type: Article

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