Polymeric (SU-8) optical microscanner driven by electrostatic actuation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 955-958

  Lee, S K ^a   Kim, M G ^a   An, J Y ^a   Jun, M H ^a   Yang, S ^a,b   Lee, J H ^a,b  

^a Gwangju Institute of Scicence and Technology (GIST)   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM LAYERS; DRIVING FREQUENCIES; ELECTROSTATIC ACTUATION; INPUT VOLTAGES; LOW COST FABRICATION; LOW FREQUENCY; MICRO MIRROR; MICRO-MECHANICAL; MICROSCANNER; NONRESONANT; OPTICAL SCANNERS; PHOTOSENSITIVE POLYMERS; SCANNING ANGLES;

ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FABRICATION; LASER RECORDING; LIGHT SENSITIVE MATERIALS; MIRRORS; POLYMERS;

SCANNING;

EID: 65949114291     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805543     Document Type: Conference Paper

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