Spin-on glass as a sacrificial layer for patterned metallization of compliant SU-8 microstructures

Canadian Conference on Electrical and Computer Engineering

Volumn , Issue , 2007, Pages 288-291

  Ma, Abdul Haseeb ^a   Tsang, See Ho ^a   Parameswaran, M ^a   Leung, Albert M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Metallization; Micromachining; Sacrificial layer, MEMS, polymer; SOG; Spin on glass; SU 8

Indexed keywords

COMPOSITE MICROMECHANICS; GLASS; LITHOGRAPHY; MACHINING; METALLIZING; MICROMACHINING; OPTICAL DESIGN; SPIN DYNAMICS; SPIN GLASS;

CHEMICAL COMPATIBILITY; ELECTRICAL AND COMPUTER ENGINEERING (ECE); FABRICATED STRUCTURES; FABRICATION PROCESSES; METALLIZATION; MICROMACHINING PROCESSING; POLYMER MEMS; SACRIFICIAL LAYERS; SPIN-ON GLASS (SOG);

PHOTORESISTS;

EID: 47249091099     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CCECE.2007.78     Document Type: Conference Paper

References (7)

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