One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

Sensors and Actuators, B: Chemical

Volumn 153, Issue 1, 2011, Pages 125-134

  Rammohan, Amritha ^a   Dwivedi, Prabhat K ^a   Martinez Duarte, Rodrigo ^b   Katepalli, Hari ^a   Madou, Marc J ^b,c   Sharma, Ashutosh ^a,d  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^b University of California at Irvine   (United States)

^c Ulsan National Institute of Science and Technology   (South Korea)

^d Yeungnam University   (South Korea)

Author keywords

Cantilevers; Grayscale lithography; Maskless; Micromixers; Microneedle arrays

Indexed keywords

CANTILEVERS; GRAY-SCALE LITHOGRAPHY; MASKLESS; MICROMIXERS; MICRONEEDLE ARRAYS;

FABRICATION; MIXERS (MACHINERY); NANOCANTILEVERS; NEEDLES; PHOTORESISTS; SOFTWARE DESIGN;

LITHOGRAPHY;

EID: 79952483906     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.10.021     Document Type: Article

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