Creating multi-layered structures with freestanding parts in SU-8

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Ceyssens, Frederik ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; MICROMACHINING; OPTICAL FIBERS; OPTICAL PROPERTIES; ULTRAVIOLET RADIATION;

FREESTANDING LAYERS; MICROCHANNELS; MULTI-LAYERED STRUCTURES;

MULTILAYERS;

EID: 33646725475     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S04     Document Type: Article

References (12)

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