A novel photoplastic piezoelectric nanocomposite for MEMS applications

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 259-261

  Prashanthi, K ^a   Naresh, M ^a   Seena, V ^b   Thundat, T ^a   Ramgopal Rao, V ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

Microelectromechanical systems (MEMS); nanocomposites; piezoelectric; SU 8 polymer; ZnO

Indexed keywords

MEMS APPLICATIONS; NEW APPLICATIONS; OPTICAL TRANSPARENCY; PHOTOPATTERNABILITY; PIEZOELECTRIC; PIEZOELECTRIC PROPERTY; SU-8 POLYMER; ZNO; ZNO NANOPARTICLES;

ELECTROMECHANICAL DEVICES; MECHATRONICS; MEMS; MICROMECHANICS; NANOCOMPOSITES; PHOTOLITHOGRAPHY; ZINC OXIDE;

PIEZOELECTRICITY;

EID: 84859697924     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2178118     Document Type: Article

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