Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement

Journal of Micromechanics and Microengineering

Volumn 20, Issue 2, 2010, Pages

  Bao, X Q ^a,b   Dargent, T ^a,c   Cattan, E ^a,c  

^a INSTITUT D ELECTRONIQUE   (France)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^c UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; BARRIER LAYERS; DESIGN VALUE; FABRICATED STRUCTURES; FABRICATION PROCESS; L-SHAPED; LOW COSTS; MEMS TECHNOLOGY; MICROMACHINES; NEW PROCESS; PROCESSING METHOD; SACRIFICIAL LAYER; STRUCTURE SIZES; SU-8 STRUCTURE; TORSION ANGLE;

COMPOSITE MICROMECHANICS; MICROMACHINING; TEMPERATURE CONTROL; THREE DIMENSIONAL;

FABRICATION;

EID: 75649145857     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025005     Document Type: Article

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