Accurate measurement of Atomic Force Microscope cantilever deflection excluding tip-surface contact with application to force calibration

Ultramicroscopy

Volumn 131, Issue , 2013, Pages 46-55

  Slattery, Ashley D ^a   Blanch, Adam J ^a   Quinton, Jamie S ^a   Gibson, Christopher T ^a  

^a Institute for NanoScale Science and Technology   (Australia)

Author keywords

AFM; Calibration; Cantilever; Focused ion beam; Sensitivity; Thermal Noise

Indexed keywords

ACCURATE MEASUREMENT; AFM; ATOMIC FORCE MICROSCOPE CANTILEVERS; CANTILEVER; CANTILEVER DEFLECTION; CANTILEVER SPRING CONSTANTS; SENSITIVITY; V-SHAPED CANTILEVERS;

CALIBRATION; FOCUSED ION BEAMS; LOADING; NANOCANTILEVERS; SAPPHIRE; SPRINGS (COMPONENTS); TESTING; THERMAL NOISE;

ATOMIC FORCE MICROSCOPY;

ACCURACY; ANALYTIC METHOD; ARTICLE; ATOMIC FORCE MICROSCOPY; CALIBRATION; CANTILEVER; CONTROLLED STUDY; DEFLEXION; ELECTRON BEAM; HYDRODYNAMICS; IMAGE QUALITY; MEDICAL DEVICE; SENSITIVITY ANALYSIS; SURFACE PROPERTY; THERMAL ANALYSIS;

EID: 84877877687     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2013.03.009     Document Type: Article

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