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Journal of Materials Chemistry C

Volumn 1, Issue 6, 2013, Pages 1160-1167

Novel ester acetal polymers and their application for positive-tone chemically amplified i-line photoresists

(4) Yu, Jinxing a Xu, Na a Wei, Qi a Wang, Liyuan a

a BEIJING NORMAL UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; ESTERIFICATION; ESTERS; ORGANIC SOLVENTS; PHOTORESISTS;

CHEMICALLY AMPLIFIED; EXPOSURE SYSTEM; NUMBER-AVERAGE; PHOTOACID GENERATORS; PHOTOACTIVE COMPOUNDS; POLYADDITION REACTIONS; POLYMER CHAINS; THERMAL DECOMPOSITION TEMPERATURE;

POLYMERS;

EID: 84876918285 PISSN: 20507534 EISSN: 20507526 Source Type: Journal
DOI: 10.1039/c2tc00670g Document Type: Article

Times cited : (19)

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