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Volumn 19, Issue 24, 2009, Pages 4085-4087
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A UV curable resin with reworkable properties: Application to imprint lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFUNCTIONAL;
HEMIACETAL ESTER;
IMPRINT LITHOGRAPHY;
METHACRYLATE MONOMERS;
PHOTOINDUCED DEGRADATION;
UV CURABLE;
UV-CURING;
CURING;
ESTERS;
MONOMERS;
RESINS;
NANOIMPRINT LITHOGRAPHY;
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EID: 67149143397
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/b905188k Document Type: Article |
Times cited : (18)
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References (24)
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