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Volumn 534, Issue , 2013, Pages 384-393

Hydrogen-argon plasma pre-treatment for improving the anti-corrosion properties of thin Al2O3 films deposited using atomic layer deposition on steel

Author keywords

Atomic layer deposition; Coating; Corrosion; Interface; Plasma pre treatment; Plasma enhanced atomic layer deposition

Indexed keywords

ANTI-CORROSION PROPERTY; ORDERS OF MAGNITUDE; OXIDE LAYER FORMATIONS; PLASMA PRE-TREATMENT; PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; POLARIZATION MEASUREMENTS; PROTECTIVE PROPERTIES; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

EID: 84876668069     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.03.022     Document Type: Article
Times cited : (25)

References (50)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.