Plasma-assisted pre-treatment for PACVD TiN coatings on tool steel

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 687-693

  Stoiber, M ^a,b   Wagner, J ^a   Mitterer, C ^b   Gammer, K ^c   Hutter, H ^c   Lugmair, C ^d   Kullmer, R ^d  

^a MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^d RUBIG GmbH & co KG Engineering   (Austria)

Author keywords

Adhesion; Hard coatings; Nitriding; Plasma assisted chemical vapor deposition (PACVD); Pre treatment

Indexed keywords

ADHESION; CHROMIUM; COMPOSITION; GASES; INDENTATION; INTERFACES (MATERIALS); NITRIDING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; PROTECTIVE COATINGS; SECONDARY ION MASS SPECTROMETRY; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS;

TOOL STEEL;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042239369     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00353-0     Document Type: Article

References (23)

1. Sundgren J.-E. Thin Solid Films 128 1985 21
2. Karlsson L. Hultman L. Sundgren J.-E. Thin Solid Films 371 2000 167
3. Mitterer C. Holler F. Üstel F. Heim D. Surf. Coat. Technol. 125 2000 233
4. Pfohl C. Bulak A. Rie K.-T. Surf. Coat. Technol. 131 2000 141
5. Heim D. Hochreiter R. Surf. Coat. Technol. 98 1998 1553
6. Mozetic M. Vacuum 61 2001 367
7. Höck K. Spies H.-J. Larisch B. Leonhardt G. Buecken B. Surf. Coat. Technol. 88 1996 44
8. Rie K.-T. Surf. Coat. Technol. 112 1999 56
9. Ma S. Li Y. Xu K. Surf. Coat. Technol. 137 2001 116
10. Walkowicz J. Smolik J. Miernik K. Bujak J. Surf. Coat. Technol. 97 1997 453
11. Starling C.M.D. Branco J.R.T. Thin Solid Films 308/309 1997 436
12. Heim D. Holler F. Mitterer C. Surf. Coat. Technol. 116-119 1999 497
13. M. Stoiber, E. Badisch, C. Mitterer, C. Lugmair, Surf. Coat. Technol., in press
14. H. Jehn, G. Reiners, N. Siegel (Eds.), DIN Fachbericht 39, Beuth Verlag, Berlin, 1993
15. Piplits K. Tomischko W. Stingeder G. Hutter H. Benninghoven A. Janssen K.T.F. Tümpner J. Werner H.W. Proceedings of the 8th International Conference on SIMS, Amsterdam, The Netherlands 1991
16. Budtz-Jørgensen C.V. Kringhøj P. Nielsen J.F. Bøttiger J. Surf. Coat. Technol. 135 2001 299
17. Edenhofer B. Heat Treat. Met. 1 1974 23
18. Hudis M. J. Appl. Phys. 44 4 1973 1489
19. Tibbetts G.G. J. Appl. Phys. 45 11 1974 5072
20. Brokman A. Tuler F.R. J. Appl. Phys. 52 1 1981 468
21. Sun Y. Bell T. Mater. Sci. Eng. A 224 1997 33
22. Buchhagen P. Bell T. Comput. Mater. Sci. 7 1996 228
23. Berg M. Budtz-Jørgensen C.V. Reitz H. et al. Surf. Coat. Technol. 124 2000 25