Improving the internal stress and wear resistance of DLC film by low content Ti doping

Solid State Sciences

Volumn 20, Issue , 2013, Pages 17-22

  Qiang, Li ^a   Zhang, Bin ^a   Zhou, Yan ^a   Zhang, Junyan ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Diamond like carbon film; Low concentration Ti doping; Stress; Wear resistance

Indexed keywords

FRICTION AND WEAR RESISTANCE; FRICTION COEFFICIENTS; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES; HYDROGENATED AMORPHOUS CARBON; LOW CONCENTRATIONS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; TI DOPING; TI-INCORPORATION;

AMORPHOUS FILMS; CARBON FILMS; HARDNESS; PHOTOELECTRONS; SILICON WAFERS; STRESSES; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

SEMICONDUCTOR DOPING;

EID: 84875731327     PISSN: 12932558     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solidstatesciences.2013.03.003     Document Type: Article

References (30)

1. J. Robertson Diamond-like amorphous carbon Materials Science and Engineering: R: Reports 37 2002 129
2. Z. Wang, C.B. Wang, B. Zhang, Q. Wang, and J.Y. Zhang Effect of negative bias on the structure, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering Surface and Interface Analysis 43 2011 1218 1223
3. G. Cho, B.K. Yen, and C.A. Klug Structural characterization of sputtered hydrogenated amorphous carbon films by solid state nuclear magnetic resonance Journal of Applied Physics 104 2008 013531
4. X.L. Bui, Y.T. Pei, and J.T.M. De Hosson Magnetron reactively sputtered Ti-DLC coatings on HNBR rubber: the influence of substrate bias Surface & Coatings Technology 202 2008 4939 4944
5. H.Y. Dai, H. Jiang, C.Y. Zhan, and N.K. Huang Effects of sputtering current on the bonding structure and mechanical properties of diamond-like carbon films deposited by MFPUMST Surface and Interface Analysis 41 2009 560
6. 3-rich deposition conditions and growth mechanism of tetrahedral amorphous carbon films deposited using filtered arc Journal of Applied Physics 104 2008 013512
7. M.C. Kang, H.S. Tak, Y.K. Jeong, H.W. Lee, and J.S. Kim Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications Diamond & Related Materials 19 2010 866 869
8. 60 targets Diamond & Related Materials 19 2010 7 14
9. B. Racine, M. Benlahsen, K. Zellama, R. Bouzerar, J.P. Kleider, and H.J. Von Bardeleben Electronic properties of hydrogenated amorphous carbon films deposited using ECR-RF plasma method Diamond & Related Materials 10 2001 200 206 (Pubitemid 32285918)
10. S.F. Yoon, K.H. Tan, Rusli, J. Ahn, and Q.F. Huang Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition Journal of Applied Physics 89 2001 4830 4835 (Pubitemid 33664406)
11. B. Yang, Z.H. Huang, C.S. Liu, Z.Y. Zeng, X.J. Fan, and D.J. Fu Characterization and properties of Ti-containing amorphous carbon nanocomposite coatings prepared by middle frequency magnetron sputtering Surface & Coatings Technology 200 2006 5812 5818
12. F. Zhao, H.X. Li, L. Ji, Y.J. Wang, H.D. Zhou, and J.M. Chen Ti-DLC films with superior friction performance Diamond & Related Materials 19 2010 342 349
13. V. Singh, J.C. Jiang, and E.I. Meletis Cr-diamond like carbon nanocomposite films: synthesis, characterization and properties Thin Solid Films 489 2005 150 158 (Pubitemid 41084158)
14. G.A. Zhang, P.X. Yan, P. Wang, Y.M. Chen, J. Zhang, L.P. Wang, and J.Y. Zhang The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C: H thin films Surface & Coatings Technology 202 2008 2684 2689 (Pubitemid 351722720)
15. J. Veverkova, and S.V. Hainsworth Effect of temperature and counterface on the tribological performance of W-DLC on a steel substrate Wear 264 2008 518 525 (Pubitemid 351178739)
16. K.D. Ma, G.B. Yang, L.G. Yu, and P.Y. Zhang Synthesis and characterization of nickel-doped diamond-like carbon film electrodeposited at a low voltage Surface & Coatings Technology 204 2010 2546 2550
17. P.V. Bharathy, D. Nataraj, P.K. Chu, H.Y. Wang, Q. Yang, M.S.R.N. Kiran, J. Silvestre-Albero, and D. Mangalaraj Effect of titanium incorporation on the structural, mechanical and biocompatible properties of DLC thin films prepared by reactive-biased target ion beam deposition method Applied Surface Science 257 2010 143 150
18. K. Bewilogua, R. Wittorf, H. Thomsen, and M. Weber DLC based coatings prepared by reactive d. c. magnetron Thin Solid Films 447-448 2004 142 147
19. W. Dai, P.L. Ke, and A.Y. Wang Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique Vacuum 85 2011 792 797
20. W. Dai, and A.Y. Wang Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources Journal of Alloys and Compounds 509 2011 4626 4631
21. I. Gerhads, C. Roning, U. Vetter, H. Hofsass, H. Gibhardt, G. Eckold, Q. Li, S.T. Lee, Y.L. Huang, and M. Seibt Ion beam synthesis of amorphous carbon thin films containing metallic nanoclusters Surface & Coatings Technology 158-159 2002 114 119 (Pubitemid 35169932)
22. A.T.T. Koh, J. Hsieh, and D.H.C. Chua Structural characterization of dual-metal containing diamond-like carbon nanocomposite films by pulsed laser deposition Diamond & Related Materials 29 2010 637 642
23. P.C. Tsai, J.Y. Chiang, and Y.F. Hwang Characteristics and mechanical properties of titanium-containing diamond like carbon films deposited by cathodic arc evaporation Journal of Nanoscience and Nanotechnology 8 2008 2516 2521
24. J.F. Cui, L. Qiang, B. Zhang, X. Ling, T. Yang, and J.Y. Zhang Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique Applied Surface Science 258 2012 5025 5030
25. P. Wang, X. Wang, Y.M. Chen, G.A. Zhang, W.M. Liu, and J.Y. Zhang The effect of applied negative bias voltage on the structure of Ti-doped a-C: H films deposited by FCVA Applied Surface Science 253 2007 3722 3726 (Pubitemid 46123716)
26. P.L. Wong, F. He, and X. Zhou Interpretation of the hardness of worn DLC particles using micro-Raman spectroscopy Tribology International 43 2010 1806 1810
27. N. Paik Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source Surface & Coatings Technology 200 2005 2170 2174 (Pubitemid 41819154)
28. Y.B. Zhang, S.P. Lau, D. Sheeja, and B.K. Tay Study of mechanical properties and stress of tetrahedral amorphous carbon films prepared by pulse biasing Surface & Coatings Technology 195 2005 338
29. G. Capote, F.L. Freire, L.G. Jacobsohn, and G. Mariotto Amorphous hydrogenated carbon films deposited by PECVD in methane atmospheres highly diluted in argon: effect of the substrate temperature Diamond & Related Materials 13 2004 1454 1458 (Pubitemid 38616484)
30. Y.N. Kok, P.E. Hovsepian, Q. Luo, D.B. Lewis, J.G. Wen, and I. Petrov Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings Thin Solid Films 475 2005 219 226 (Pubitemid 40210992)