Characteristics and mechanical properties of titanium-containing diamond like carbon films deposited by cathodic arc evaporation

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 5, 2008, Pages 2516-2521

  Tsai, Pi Chuen ^a   Chiang, Jueh Yu ^b   Hwang, Yen Fei ^c  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b AU OPTRONICS CORPORATION   (Taiwan)

^c CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

Author keywords

Carbides containing; Cathodic arc plasma; Characterization; Diamond like carbon; Mechanical properties; Microstructure; Thin films deposition

Indexed keywords

(PL) PROPERTIES; CATHODIC ARC EVAPORATION (CAE); DIAMOND LIKE CARBON (DLC);

CARBON FILMS; DIAMOND FILMS; DIAMONDS; MECHANICAL PROPERTIES; MIXING; TITANIUM;

DIAMOND LIKE CARBON FILMS;

EID: 45849086586     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2008.600     Document Type: Conference Paper

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